Sequential Infiltration Synthesis of Silicon Dioxide in Polymers with Ester Groups-Insight from In Situ Infrared Spectroscopy

Mahua Biswas,Vepa Rozyyev,Anil U. Mane,Amelia Korveziroska,Uttam Manna,Jeffrey W. Elam
DOI: https://doi.org/10.1021/acs.jpcc.3c07571
2024-04-26
The Journal of Physical Chemistry C
Abstract:New strategies to synthesize nanometer-scale silicon dioxide (SiO(2)) patterns have drawn much attention in applications such as microelectronic and optoelectronic devices, membranes, and sensors, as we are approaching device dimensions shrinking below 10 nm. In this regard, sequential infiltration synthesis (SIS), a two-step gas-phase molecular assembly process that enables localized inorganic material growth in the targeted reactive domains of polymers, is an attractive process. In this work,...
chemistry, physical,nanoscience & nanotechnology,materials science, multidisciplinary
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