Purification of platinum and gold structures after electron-beam-induced deposition

A Botman,J J L Mulders,R Weemaes,S Mentink
DOI: https://doi.org/10.1088/0957-4484/17/15/028
IF: 3.5
2006-07-03
Nanotechnology
Abstract:The technique of electron-beam-induced deposition (EBID), when performed with organic precursors, typically results in relatively low metal content due to the partial decomposition of the organic precursor, leaving carbon-rich remnants in the deposition. Here we describe a method applied to noble-metal structures deposited using EBID, consisting of a post-treatment step of heating in a reactive atmosphere of oxygen, whereby the amount of carbon in the structure is strongly reduced. As a result, we have been able to increase the purity of platinum deposits from 15?at.% to nearly 70?at.%, and gold similarly from 8?at.% to nearly 60?at.%. The resistivity of these structures has also been improved by up to four orders of magnitude, to achieve (1.4 ? 0.2) ? 104????cm in the case of platinum.
materials science, multidisciplinary,physics, applied,nanoscience & nanotechnology
What problem does this paper attempt to address?