Abstract:Coherent deep ultraviolet (DUV) light sources are crucial for various applications such as nanolithography, biomedical imaging, and spectroscopy. DUV light sources can be generated by using conventional nonlinear optical crystals (NLOs). However, NLOs are limited by their bulky size, inadequate transparency at the DUV regime, and stringent phase-matching requirements for harmonic generation. Recently, dielectric metasurfaces support high Q-factor resonances and offer a promising approach for efficient harmonic generation at short wavelengths. In this study, we demonstrated a crystalline silicon (c-Si) metasurface simultaneously exciting modal phase-matched bound states in the continuum (BIC) resonance at the fundamental wavelength of 840 nm with a higher degree of freedom for precise control of the BIC resonance and a plasmonic resonance at the wavelength of 280 nm in the DUV to enhance third harmonic generation (THG). We experimentally achieved a Q-factor of ∼180 owing to the relatively large refractive index of the c-Si and the geometric symmetry breaking of the structure. We realized THG at a wavelength of 280 nm with a power of 14.5 nW by using a peak power density of 15 GW/cm2 excitation. The measured THG power is 14 times higher than the state-of-the-art THG dielectric metasurfaces using the same peak power density in the DUV regime, and the maximum obtained THG power enhancement factor is up to 48. This approach relies on the significant third-order nonlinear susceptibility of c-Si, the interband plasmonic nature of the c-Si in the DUV, and the strong field confinement of BIC resonance to boost overall nonlinear conversion efficiency to 5.2 × 10-6% in the DUV regime. Our work shows the potential of c-Si BIC metasurfaces for developing efficient and ultracompact DUV light sources using high-efficacy nonlinear optical devices.

Dielectric loading method for doubly resonant enhancement of third-harmonic generation from complementary split-ring resonators

Tailoring the Bound States in the Multi-Channel Nonlinear Plasmonic Metasurfaces

Terahertz Generation from Plasmonic Metasurfaces

Mode Coupling Based on Split-Ring Resonators and Waveguide and Second Harmonic Enhancement

Doubly-resonant Enhanced Second-Harmonic Generation and Its Wide-Band Tunability

230-fold Enhancement of second-harmonic generation by coupled double resonances in a dolmen-type gold metasurface

Engineered Second-Harmonic Diffraction from Highly Transmissive Metasurfaces Composed of Complementary Split-Ring Resonators.

Nonlinear dielectric geometric-phase metasurface with simultaneous structure and lattice symmetry design

Resonantly Enhanced Second-Harmonic Generation Using III–V Semiconductor All-Dielectric Metasurfaces

Doubly Enhanced Third Harmonic Generation in Metal-Based Silicon Nanodisks

Tunable third harmonic generation based on high-Q polarization-controlled hybrid phase-change metasurface

Third harmonic generation from the gold/amorphous silicon hybrid metasurface

Multistate Tuning of Third Harmonic Generation in Fano-Resonant Hybrid Dielectric Metasurfaces

Nonlinear Fano-Resonant Dielectric Metasurfaces.

Modal Phase-Matched Bound States in the Continuum for Enhancing Third Harmonic Generation of Deep Ultraviolet Emission

Enhanced wide-angle third-harmonic generation in flat-band-engineered quasi-BIC metagratings

Enhanced third-harmonic generation and degenerate four-wave mixing in an all-dielectric metasurfaces via Brillouin zone folding-induced bound states in the continuum

Enhanced harmonic generation in gases using an all-dielectric metasurface

Multistate Tuning of Third Harmonic Generation in Fano‐Resonant Hybrid Dielectric Metasurfaces

Efficient Second-Harmonic Generation from Dielectric Inter-subband Polaritonic Metasurfaces Coupled to Lattice Resonance

Ultra-broadband Enhancement of Nonlinear Optical Processes from Randomly Patterned Super Absorbing Metasurfaces