The importance of overcoming MOVPE surface evolution instabilities for >1.3 $μ$m metamorphic lasers on GaAs

Enrica E. Mura,Agnieszka M. Gocalinska,Megan O'Brien,Ruggero Loi,Gediminas Juska,Stefano T. Moroni,James O'Callaghan,Miryam Arredondo,Brian Corbett,Emanuele Pelucchi
DOI: https://doi.org/10.48550/arXiv.2103.08267
2021-03-15
Applied Physics
Abstract:We investigated and demonstrated a 1.3 $\mu$m-band laser grown by metalorganic vapour phase epitaxy (MOVPE) on a specially engineered metamorphic parabolic graded In$_x$Ga$_{1-x}$As buffer and epitaxial structure on a GaAs substrate. Bottom and upper cladding layers were built as a combination of AlInGaAs and InGaP alloys in a superlattice sequence. This was implemented to overcome (previously unreported) detrimental surface epitaxial dynamics and instabilities: when single alloys are utilised to achieve thick layers on metamorphic structures, surface instabilities induce defect generation. This has represented a historically limiting factor for metamorphic lasers by MOVPE. We describe a number of alternative strategies to achieve smooth surface morphology to obtain efficient compressively strained In$_{0.4}$Ga$_{0.6}$As quantum wells in the active layer. The resulting lasers exhibited low lasing threshold with total slope efficiency of 0.34 W/A for a 500 $\mu$m long ridge waveguide device. The emission wavelength is extended as far as 1360 nm.
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