Removal of sulfur hexafluoride in molten-tin bubble column reactors: Kinetics parameter identification and scale-up studies

Son Ich Ngo,Young-Il Lim,Whi Dong Kim,Hyunmin Kwon,Uen-Do Lee
DOI: https://doi.org/10.1016/j.seppur.2024.126776
IF: 8.6
2024-02-19
Separation and Purification Technology
Abstract:This study presents the degradation of sulfur hexafluoride (SF 6 ), which is a greenhouse gas emitted from semiconductor industry, in a molten metal bubble column reactor (MMBCR) using tin. Experiments were conducted in a bench-scale MMBCR ranging from 468 °C to 668 °C using a mixture of N 2 and 1000 ppm SF 6 to estimate reaction kinetic parameters, where high-value solid product (SnS and SnF 2 ) used in solar-cell devices were produced. A one-dimensional MMBCR model integrating reaction kinetics, axial dispersion, and heat transfer was formulated to investigate hydrodynamics and the performance of three pilot-scale multitubular MMBCRs at a feed flow rate of 300 LPM. At 650 °C, the SF 6 removal efficiencies ( η ) of the pilot-scale MMBCRs with 80, 60, and 40 tubes at the same height (=0.5 m) and diameter (=0.1 m) were 85 %, 83 %, and 82 %, respectively. The pilot-scale MMBCR featuring 80 tubes exhibited the highest η owing to a low axial dispersion coefficient and high residence time. This study provides useful insights and guidelines for the design and upscaling of SF 6 degradation processes utilizing MMBCRs in the semiconductor industry.
engineering, chemical
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