Parameter Optimization of Semiconductor Gas Sensor under AC Impedance Measurement

Jifeng Chu,Zhuoli Deng,Jianbin Pan,Aijun Yang,Qiongyuan Wang,Hongye Yuan,Huan Yuan,Feng Xin,Mingzhe Rong,Xiaohua Wang
DOI: https://doi.org/10.1021/acssensors.4c01903
IF: 8.9
2024-10-18
ACS Sensors
Abstract:Semiconductor gas sensors were confirmed to perform high linearity and a stable baseline under alternating current (AC) impedance measurements. However, a procedure to determine the optimal parameters of AC impedance measurements is still lacking. Taking the detection of SF(6) decomposition gas as an example, this work has established a model of semiconductor gas sensors under AC impedance measurement. Employing four types of sensors to detect three gases (H(2)S, SO(2), and CO), the...
chemistry, multidisciplinary, analytical,nanoscience & nanotechnology
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