Abstract:Superconductors are used in military and commercial applications due to the full diamagnetic and zero resistance properties. Hereinto, niobium nitride (NbN) has been extensively studied for its excellent superconducting properties, such as high transition temperature (T-c), large superconducting energy gap, narrow transition width and good stability. Superconducting NbN films are widely used in low temperature superconducting devices, for instance, hot electron bolometer, superconducting quantum interference devices and rapid single flux quantum. Especially, in 2001 Gol'tsman has successfully detected a single photon response of 810 nm near-infrared using an ultra-thin superconducting NbN, which proved that the high-quality growth of ultra-thin NbN film was the key step for high resolution and sensitivity of the superconducting detector. Up to now, atomic layer deposition (ALD), molecular beam epitaxy (MBE), pulsed laser deposition (PLD) and magnetron sputtering have been successfully used to grow NbN thin films. However, T-c is decreasing gradually as the reduced of thickness. Therefore, there is still a challenge to grow ultra-thin superconducting NbN film with high performance.In this work, 5 nm thickness of superconducting epitaxial NbN film has been grown on MgO < 100 > substrate by magnetron sputtering. We systematically study the effect of different sputtering parameters on the superconductivity properties of the NbN film. The experiment results show that the high vacuum, high sputtering temperature and low working pressure are positively correlated with the superconducting transition temperature of NbN film under the premise of suitable argon-nitrogen ratio or magnetron power. The analyses of physical property measurement system (PPMS) indicate that as-grown 5 nm-thick NbN film has high performance with a superconducting transition temperature as high as 12.5 K under the optimum condition. Morphologic characterizations show that the ultra-thin NbN films have high density and smoothness with 0.116 nm of the surface roughness. Microstructural measurements also illustrate the epitaxial growth of NbN on MgO substrate. This work demonstrates the ultra-thin NbN films can be well controllably grown with high quality and offers a platform to fabricate the ultra-thin superconducting devices in the coming future.

Anomalous skin effect study of superconducting film

Study of the anomalous skin effect of normal conducting film

Study of the skin effect in superconducting materials

Anisotropic Conduction Induced by Current Processing in the La0.8ca0.2mno3 Film

Upper critical field and superconductor-metal transition in ultrathin niobium films

Influence Mechanism of RF Bias on Microstructure and Superconducting Properties of Sputtered Niobium Thin Films

Electrical and Thermoelectric Study of Two-Dimensional Crystal of NbSe2

Study of Stress and Morphology of Superconducting Niobium Thin Films

Dimensional crossover and incipient quantum size effects in superconducting niobium nanofilms

Electric Field Effect On Superconductivity In Atomically Thin Flakes Of Nbse2

The effect of niobium thin film structure on losses in superconducting circuits

Anomalous Magnetoresistance Oscillations and Enhanced Superconductivity in Single-Crystal Pb Nanobelts

The Effect of Thickness of Niobium Isolation Layer on Properties of Copper-Based Nb3Sn Films

Cascade Excitation of Vortex Motion and Reentrant Superconductivity in Flexible Nb Thin Films

Substrate mediated nitridation of niobium into superconducting Nb2N thin films for phase slip study

Thickness effect on superconducting properties of niobium films for radio-frequency cavity applications

Change of surface critical current in the surface superconductivity and mixed states of superconducting Niobium

Influence Of Different Sputtering Conditions On Superconductivity Of Ultra-Thin Epitaxial Niobium Nitride Film

A low energy muon spin rotation and point contact tunneling study of niobium films prepared for superconducting cavities

Peculiarities of the Thickness Dependence of the Superconducting Properties of Thin Nb Films

NbN Films on Flexible and Thickness Controllable Dielectric Substrates