Phase demodulation method of high line density grating interferometric signal based on wavelet transform

Zhangning Xie,Tao Jin,Lihua Lei,ZiChao Lin,Dongbai Xue,Xiong Dun,xiao deng,Xinbin Cheng
DOI: https://doi.org/10.1364/oe.517936
IF: 3.8
2024-04-24
Optics Express
Abstract:Zhangning Xie, Tao Jin, Lihua Lei, Zichao Lin, Dongbai Xue, Xiong Dun, Xiao Deng, Xinbin Cheng The increasing line density of the reference grating and the accelerating miniaturization of ultra-precision displacement measurement ... [Opt. Express 32, 16855-16866 (2024)]
optics
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