Humidity Sensing Properties of Different Atomic Layers of Graphene on the SiO 2 /Si Substrate

Qiang Gao,Hongliang Ma,Chang He,Xiaojing Wang,Jie Ding,Wendong Zhang,Xuge Fan
DOI: https://doi.org/10.1021/acsami.4c11194
IF: 9.5
2024-10-04
ACS Applied Materials & Interfaces
Abstract:Graphene has great potential to be used for humidity sensing due to its ultrahigh surface area and conductivity. However, the impact of different atomic layers of graphene on the SiO(2)/Si substrate on humidity sensing has not been studied yet. In this paper, we fabricated three types of humidity sensors on the SiO(2)/Si substrate based on one to three atomic layers of graphene, in which the sensing areas of graphene are 75 μm × 72 μm and 45 μm × 72 μm, respectively. We studied the impact of...
materials science, multidisciplinary,nanoscience & nanotechnology
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