Abstract:Because of its atomic thickness, excellent properties, and widespread applications, graphene is regarded as one of the most promising candidate materials for nanoelectronics. The wider use of graphene will require processes that produce this material in a controllable manner. In this Account, we focus on our recent studies of the controllable chemical vapor deposition (CVD) growth of graphene, especially few-layer graphene (FLG), and the applications of this material in electronic devices. CVD provides various means of control over the morphologies of the produced graph ene. We studied several variables that can affect the CVD growth of graphene, including the catalyst, gas flow rate, growth time, and growth temperature and successfully achieved the controlled growth of hexagonal graphene crystals. Moreover, we developed several modified CVD methods for the controlled growth of FLGs. Patterned CVD produced FLGs with desired shapes in required areas. By introducing dopant precursor in the CVD process, we produced substitutionally doped FLGs, avoiding the typically complicated post-treatment processes for graphene doping. We developed a template CVD method to produce FLG ribbons with controllable morphologies on a large scale. An oxidation-activated surface facilitated the CVD growth of polycrystalline graphene without the use of a metal catalyst or a complicated postgrowth transfer process. In devices, CVD offers a controllable means to modulate the electronic properties of the graphene samples and to improve device performance. Using CVD-grown hexagonal graphene crystals as the channel materials in field-effect transistors (FETs), we improved carrier mobility. Substitutional doping of graphene in CVD opened a band gap for efficient FET operation and modulated the Fermi energy level for n-type or p-type features. The similarity between the chemical structure of graphene and organic semiconductors suggests potential applications of graphene in organic devices. We used patterned CVD FLGs as the bottom electrodes in pentacene FETs. The strong π-π interactions between graphene and pentacene produced an excellent interface with low contact resistance and a reduced injection barrier, which dramatically enhances the device performance. We also fabricated reversible nanoelectromechanical (NEM) switches and a logic gate using the FLG ribbons produced using our template CVD method. In summary, CVD provides a controllable means to produce graphene samples with both large area and high quality. We developed several modified CVD methods to produce FLG samples with controlled shape, location, edge, layer, dopant, and growth substrate. As a result, we can modulate the properties of FLGs, which provides materials that could be used in FETs, OFETs, and NEM devices. Despite remarkable advances in this field, further exploration is required to produce consistent, homogeneous graphene samples with single layer, single crystal, and large area for graphene-based electronics.

Graphene synthesis by chemical vapor deposition and transfer by a roll-to-roll process

Characterization Of Graphene Grown On Bulk And Thin Film Nickel

Review of Chemical Vapor Deposition of Graphene and Related Applications

One-step Chemical Vapor Synthesis of Ni/graphene Nanocomposites with Excellent Electromagnetic and Electrocatalytic Properties

Wafer-scale synthesis and transfer of monolayer graphene

Controllable Chemical Vapor Deposition Growth of Few Layer Graphene for Electronic Devices.

Synthesis of Single-Layer Graphene on Nickel Using A Droplet Cvd Process

Fast, wafer-scale growth of a nanometer-thick graphite film on Ni foil and its structural analysis

Single-layer Graphene Nearly 100% Covering an Entire Substrate

Large-Area Synthesis of High-Quality and Uniform Graphene Films on Copper Foils

Self-Terminating Confinement Approach for Large-Area Uniform Monolayer Graphene Directly over Si/Siox by Chemical Vapor Deposition

Graphene Growth by Transfer-Free CVD Method Using Cobalt/Nickel Catalyst Layer

Transfer of Graphene with Protective Oxide Layers

High Quality Graphene Thin Films Synthesized by Glow Discharge Method in A Chemical Vapor Deposition System Using Solid Carbon Source

Electrostatic deposition of graphene in a gaseous environment: A deterministic route to synthesize rolled graphenes?

Graphene thickness control via gas-phase dynamics in chemical vapor deposition

Graphene synthesis by laser-assisted chemical vapor deposition on Ni plate and the effect of process parameters on uniform graphene growth

Single-crystal, large-area, fold-free monolayer graphene

Selective Mechanical Transfer of Graphene from Seed Copper Foil Using Rate Effects

Transfer of Cvd-Grown Monolayer Graphene Onto Arbitrary Substrates

Synthesis of Graphene Wafers: from Lab to Fab