Fuzzy Fractional Order PID Control of Micro Nano Positioning Platform

Lina Hao,Meng Liu,Huiming Qi,Ying Zhang
DOI: https://doi.org/10.1109/3m-nano61605.2024.10769657
2024-01-01
Abstract:Micro-nano positioning technology is utilized in various fields, including biomedical engineering, micro-assembly, cell injection, and microchip manufacturing, and so on. Among these technologies, the piezoelectric-driven micro-nano positioning platform, which employs a piezoelectric ceramic actuator as the driving device, is one of the most commonly used positioning devices in micro positioning applications. However, the hysteresis of piezoelectric ceramic (PZT) actuators adversely affects the positioning accuracy of these platforms. In this paper, we propose a fuzzy fractional-order PID (FFOPID) controller to compensate for the hysteresis behavior of piezoelectric ceramics. This controller integrates fuzzy theory, where the membership functions and fuzzy rules are designed to create a FFOPID controller capable of mitigating the hysteresis effects of piezoelectric ceramics. Experimental results demonstrate that the FFOPID controller effectively reduces the rate-dependent hysteresis of the micro-nano positioning platform, thereby enhancing the adaptability and precision of the control system.
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