Abstract:Piezoelectric actuators are widely used in the field of micro-nano driving due to their advantages of fast frequency response, high displacement resolution, large stiffness, small size, and low heat generation. However, the hysteresis non-linearity of piezoelectric actuators severely affects their positioning accuracy during operation. Therefore, the study of hysteresis modeling and compensation control for piezoelectric actuators has always been a hot topic in the field of micro-nano driving. However, existing hysteresis models and control methods cannot well describe the dynamic hysteresis curve of piezoelectric actuators and track the desired trajectory. To address this issue, this paper proposes an improved dynamic Prandtl-Ishlinskii (IDPI) model and a finite-time trajectory tracking adaptive sliding mode control method based on PID-type. Firstly, this paper introduces the construction and parameter identification method of the IDPI model. Secondly, the accuracy of the IDPI model in describing hysteresis curves under different input signals is verified through experiments, and the effectiveness of the feedforward controller based on the IDPI model is validated experimentally. Then, considering the modeling uncertainty, unmodeled internal dynamics, and external environmental disturbances of the piezoelectric micro-motion platform, a finite-time trajectory tracking adaptive sliding mode controller based on PID-type is designed to suppress the non-linear characteristics of the piezoelectric micro-motion platform. Finally, the performance of the compensator is verified through simulation experiments.

Fuzzy Fractional Order PID Control of Micro Nano Positioning Platform

Precision control of piezoelectric actuator using support vector regression nonlinear model and neural networks

Precision Control of A Piezo-Actuate System Using Fuzzy Sliding-Mode Control with Feedforward Predictor-Based Compensation

An improved dynamic prandtl-ishlinskii hysteresis model and a PID-type adaptive sliding mode controller for piezoelectric micro-motion platform

Tracking Control of a Piezo Actuated System using Fuzzy Sliding-Mode Control with Feedforward Compensation

High precision robust control design of piezoelectric nanopositioning platform

Application of Adaptive Fuzzy PID Controller to Nano-scale Precision Motion Stage System

Fractional Order PID Control of a Motion Platform

Modeling and Control of Piezoelectric Hysteresis: A Polynomial-Based Fractional Order Disturbance Compensation Approach

Modeling of dynamic characteristics and μ-synthesis control of piezoelectric positioning platform

Robust Adaptive Backstepping Control for Piezoelectric Nano-Manipulating Systems

Learning-Enhanced PI and Fuzzy-Sliding-Mode Tracking of a Piezo-Actuated System

Time-Frequency Analysis-Based Real-Time Iterative Compensation for Piezoelectric Nanopositioning Stage

Study on open-loop precision positioning control of a micropositioning platform using a piezoelectric actuator

Charge Controller with a Novel Hysteresis Disturbance Observer for High-Accuracy Trajectory Tracking of Piezoelectric Actuators

Prandtl-Ishlinskii Model-Based Adaptive Feedforward Control for Piezoelectric-Stack-actuator-driven Systems

Feedforward and Feedback Control for Piezoelectric-Actuated Systems Using Inverse Prandtl-Ishlinskii Model and Particle Swarm Optimization

Control of a 3D Piezo-Actuating Table by Using an Adaptive Sliding-Mode Controller for a Drilling Process.

Model-Based Control for Piezoelectric-Actuated Systems Using Inverse Prandtl-Ishlinskii Model and Particle Swarm Optimization

Study on Non-linear Model of Piezoelectric Actuator and Accurate Positioning Control Strategy

Tracking Control of a Compliant XY Nano-Positioner under Plant Uncertainty Using a Transfigured Loop-Shaping H∞ Controller