Multi-scale Finite Element Simulation of 2.5D Advanced Packaging for Integrated Circuits during Manufacturing Process
Zhiyan Zhao,Ruiqian Zheng,Wenqian Li,Wen Qiao,Mengxuan Cheng,Nan Sheng,Yuxi Jia,Xiaohui Zhao
DOI: https://doi.org/10.1109/ICEPT63120.2024.10668426
2024-08-07
Abstract:Under the new demands drived by artificial intelligence and high-performance computing, 2.5D packaging has become a typical advanced packaging technology. This paper proposes a multi-scale modeling and simulation method to focus on the reliability issues of integrated circuit 2.5D packages in various process manufacturing stages, such as underfill curing, epoxy molding compound (EMC) curing, and solder reflow between the interposer and the substrate. This paper establishes a model comprising underfill, EMC, interposer and substrate, and adopts multi-scale finite element analysis to study the 2.5D packaging deformation and stress patterns during the underfill and EMC curing processes, as well as solder reflow and other manufacturing processes. The deformation and stress behaviors of the 2.5D package throughout these processes are tracked. The results show that after curing the package exhibits a convex morphology with a warp value of 79.57μm for EMC, 22.72μm for the underfill layer, and 78.73μm for the silicon interposer layer. The warping deformation of EMC will affect the overall warping trend of the package. The Mises Stress values of the stress concentration areas in the EMC, base filler layer, and interposer layer increased by 42.29%, 12.38%, and 10.22% compared to the global model. After solder reflow, the maximum equivalent stress in the micro solder balls is found at the edge of the solder ball array, with a maximum stress value of 39.67 MPa. The maximum value of stress in each component of the package appeared at the mutual contact area of each component.
Engineering,Materials Science