Sensitive and Repeatable Optical Fiber Hydrogen Sensors Using Plasma-induced Oxygen Vacancies Magnetron Sputtering Coating Technique

Zhiyong Yang,Jianbang Chen,Xingwang Long,Lei Liu,Yanyu Jiang,Zhicong Ren,Junfeng Peng,Daotong You,Tuan Guo
DOI: https://doi.org/10.1109/jlt.2024.3493593
IF: 4.7
2024-01-01
Journal of Lightwave Technology
Abstract:Controlling the formation of oxygen vacancies (OVs) in metal oxide semiconductors (as the gas sensing material) is a significant important, that dominates the sensor's performances for the target of gas (sensitivity, repeatability, response time et al). In this study, we proposed a tilted fiber Bragg grating assisted hydrogen sensor with hybrid palladium and OVs-modified WO3 metal oxide semiconductors surface functionalization. The innovation of this work is that we propose an Ar plasma-etching technique to regulate OVs concentration in WO3 by adjusting magnetron sputtering power. The experimental results demonstrate that the signal-to-noise ratio of the proposed H2 sensor has been much improved, offering a limit of detection as low as 8 ppm together with a strongly enhanced reproducibility for dozens of repeat H2 measurements. This flexible coating technique offers a mass production way of high-quality specific material functionalization for various kinds of gas sensing.
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