Abstract:With the growing global need for semiconductor preparation, the demand on the performance of ultra-clean volumetric pumps is increasingly stringent, which is facing challenges of small displacement, high energy consumption, and low lifespan. In this paper, a kresling origami structure pump chamber (KOSC) is proposed, inheriting programmable and bistable characteristics of kresling structure to enhance the ultra-clean volumetric pump performance. The key programmable geometric design parameters for bistable state are identified by deriving the mathematical model. Simulation analysis is carried out based on the truss rod model in ABAQUS to get the relationship between the design parameters and bistability accordingly, whose accuracy is verified by origami model compression experiments. Then, comparisons between the proposed KOSC and traditional bellows with the same height and diameter, involving the mechanical properties of compression characteristics and energy efficiency, and fluid-solid coupling analysis, are performed in COMSOL Multiphysics. The compression results show that KOSC compresses 3 times than bellows under equal force, with 1.8 times the ultimate compression amount (18 mm), and only half the energy for equal compression amount. Compression experiments were conducted using bellows to demonstrate the reliability of the simulations. The fluid-solid coupling results show that the flow rate of KOSC is 3 times than that of bellows under equal force, and with 1.75 times displacement for equal velocity compression. Pumping experiments were conducted using bellows to demonstrate the reliability of the simulations. The above simulation and experimental results confirm that the KOSC enables high displacement, low energy consumption, and guarantees an extended lifespan.

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