Optimization of Bellows in Bellows Pumps for Higher Pumping Efficiency

Zhijian Gao,Fei Xue,Liang Fu,Rui Su,Xiaodong Ruan,Xin Fu
DOI: https://doi.org/10.1117/12.2655008
2022-01-01
Abstract:As one of the few pumps that can meet the ultra-pure and corrosion-resistant requirements in semiconductors, the bellows pump is in demand with high pumping efficiency for the high space cost of the semiconductor machine. Pumping efficiency means the flowrate per unit volume of pump, which is determined by bellows, the main cavity of bellows pump. Therefore, the key to improving pump performance lies in the optimization of the bellows. This paper derives the equations describing the relationship between the geometric parameters and properties of bellows. Combined with the movement analysis of bellows, the relationship among the stiffness, the displacement, and the flowrate is clarified. According to the relationship between the bellows parameters and the flowrate, a bellows with higher pumping efficiency is designed. The high agreement between experiments and calculations shows that the design is valid. We believe that this research can help design bellows with higher pumping efficiency in bellows pump.
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