A 2000-Volumes/s 3D Ultrasound Imaging Chip with Monolithically-Integrated 11.7×23.4mm2 2048-Element CMUT Array and Arbitrary-Wave TX Beamformer

Nuriel N. M. Rozsa,Zhao Chen,Taehoon Kim,Peng Guo,Yannick Hopf,Jason D. Voorneveld,Djalma Simões dos Santos,Emile Noothout,Zu-Yao Chang,Chao Chen,Vincent A. Henneken,Nico de Jong,Hendrik J. Vos,Johan G. Bosch,Martin D. Verweij,Michiel A. P. Pertijs
DOI: https://doi.org/10.1109/vlsitechnologyandcir46783.2024.10631363
2024-01-01
Abstract:This work presents an ultrasound imaging chip with a monolithically integrated 32×64 element CMUT array, capable of imaging a large 60°×60°×10 cm field-of-view (Fo V) at 2000 vol/s, the highest 3D volume rate reported to date. By combining 2x time-division multiplexing (TDM) with 2×2-element micro-beamforming, it reduces the output channel-count 8x. Equalization (EQ), trained using a pseudo-random bit-sequence (PRBS) generated on-chip, reduces TDM-induced crosstalk by 19 dB, enabling power-efficient scaling of the cable drivers. A novel transmit (TX) beamformer, implemented as a programmable digital pipeline, enables arbitrary TX beamforming with arbitrary pulse-density modulated (PDM) waveforms and drives element-level 65 V unipolar pulsers. The chip features a layout matched to the 365-um-pitch CMUT array, and consumes 1.30 mW/ch.
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