Design, Fabrication, and Characterization of 1-3 Piezoelectric Composite Air-Coupled Ultrasonic Transducers with Micro-Membrane Filter Matching Layer

Chuanmin Wang,Huayun Gao,Xinyi Zhou,Weigang Ma,Hua Tan,Chanatip Samart,David Salamon,Chunze Yan,Haibo Zhang
DOI: https://doi.org/10.1016/j.sna.2024.115955
2024-01-01
Abstract:Air-coupled ultrasonic transducers are widely used in various fields of nondestructive material characterization. This paper presents the fabrication and performance characterization of 1-3 piezoelectric composite air-coupled ultrasonic transducers operating at frequencies ranging from 400 kHz to 600 kHz. The transducers are fabricated using a dice-and-fill method with PZT-5 as the active material. A double-layer matching strategy is employed, utilizing hollow glass microsphere filled epoxy resin as the first matching and bonding layer. Additionally, micro- membrane filters with different pore sizes are used as the second matching layer. Thermoplastic adhesive TPU is utilized to bind the micro-membrane filter and the first matching layer. Due to the low acoustic impedance of the hollow glass microsphere filled epoxy resin and micro-membrane filter, acoustic impedance mismatch is reduced. Finite element simulation is used to determine the optimal ceramic volume fraction and ceramic pillar height of the 1-3 piezoelectric composites. When the pore size of the micro-membrane filter is 0.8 mu m, the transducer achieves the lowest two-way insertion loss of-56.86 dB and the highest-6 dB bandwidth of 15.6 %, making it feasible for through mode applications.
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