Enhanced Photo-Thermoelectric Detection in Black Silicon with Chimney-Like Texture

Zhou Zhao,Zengxing Zhang,Rui Guo,Weipeng Shi,Qingchao Zhang,Yuzhen Guo,Yonghua Wang,Dan Liu,Chenyang Xue
DOI: https://doi.org/10.1016/j.mtcomm.2024.109723
IF: 3.8
2024-01-01
Materials Today Communications
Abstract:Photo-thermoelectric (PTE) detectors, which use the physical processes of photothermal conversion and thermoelectric conversion, becoming increasingly important in infrared light detection. As a material with excellent optical properties, black silicon has a high absorption in the visible-near-infrared wavelength range. It is an ideal light absorber for photothermal conversion in PTE detectors. In this work, black silicon with chimney-like texture is proposed to improve the performance of PTE detectors. The black silicon is fabricated using a two-step etching process, which has an absorption of up to 99.5 % in the 220 - 1000 nm wavelength range. By utilizing the localized surface plasmon resonance (LSPR) effect caused by the deposition of Au nanoparticles on black silicon, the absorption is increased above 1100 nm wavelength and reaches 34.4 % at 1550 nm. The black silicon with/ without Au nanoparticles is attached to the thermoelectric module to fabricate the black silicon PTE devices, and their performances are evaluated under different wavelength laser irradiation. The maximum output voltage of the device is 9.6 mV at 950 nm, whereas it reaches 14.5 mV when Au nanoparticles are deposited. After Au loading, the rise times(r r ) and decay time(r d ) are measured to be 25.78 s and 27.22 s, respectively. The results exhibit that the black silicon significantly improves the photothermal conversion efficiency of the device while also causing the device to show electrical response in visible and near-infrared wavelength ranges, paving a new way for the improvement of PTE technology.
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