Abstract:This study presents a hybrid thermal lithography method combining scalable microscale patterning based on direct‐write laser with nanoscale/ grayscale patterning based on thermal scanning probe lithography. This study demonstrates that the bio‐polymer silk fibroin shows excellent characteristics as positive tone resist and can be developed in DI water aiming for high‐resolution green‐nanomanufacturing. Silk fibroin (SF) is a natural material with polymorphic structures that determine its water solubility and biodegradability, which can be altered by exposing it to heat. Here, a hybrid thermal lithography method combining scalable microscale laser‐based patterning with nanoscale patterning based on thermal scanning probe lithography is developed. The latter enables in addition grayscale patterns to be made. The resolution limit of the writing in silk fibroin is studied by using a nanoscale heat source from a scanned nanoprobe. The heat thereby induces local water solubility change in the film, which can subsequently be developed in deionized water. Nanopatterns and grayscale patterns down to 50 nm lateral resolution are successfully written in the silk fibroin that behaves like a positive tone resist. The resulting patterned silk fibroin is then applied as a mask for dry etching of SiO2 to form a hard mask for further nano‐processing. A very high selectivity of 42:1 between SiO2 and silk fibroin is obtained allowing for high‐aspect ratio structure to be fabricated. The fabricated nanostructures have very low line edge roughness of 5 ± 2 nm. The results demonstrate the potential of silk fibroin as a water‐soluble resist for hybrid thermal lithography and precise micro/nanofabrication.

Silk Fibroin As a Resist for Thermal Scanning Probe Lithography

Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication

Silk as a biodegradable resist for field-emission scanning probe lithography

Aqueous Multiphoton Lithography with Multifunctional Silk-Centred Bio-Resists

3D freeform printing of silk fibroin

Fabrication and characterization of porous tubular silk fibroin scaffolds.

Precise Protein Photolithography (P3): High Performance Biopatterning Using Silk Fibroin Light Chain As the Resist.

"Print-to-pattern": Silk-Based Water Lithography.

Differential Regulation of Antigen-Specific CD8+ T Cell Responses by IL-12p40 in a Dose-Dependent Manner1

Biopatterning: Precise Protein Photolithography (P3): High Performance Biopatterning Using Silk Fibroin Light Chain As the Resist (adv. Sci. 9/2017)

Recording and Revealing 2.5D Nanopatterned Hidden Information on Silk Protein Bioresists

Nanoscale Probing of Electron-Regulated Structural Transitions in Silk Proteins by Near-Field IR Imaging and Nano-Spectroscopy

Water Lithography: “Print-to-pattern”: Silk-Based Water Lithography (Small 47/2018)

Towards Non‐stick Silk: Tuning the Hydrophobicity of Silk Fibroin Protein

Challenges and Advances in Aerosol Jet Printing of Regenerated Silk Fibroin Solutions

Silk protein connecting water and nanofabrication

Direct patterning using protein-based water lithography

Fabrication of Silk Fibroin Film with Properties of Thermal Insulation and Temperature Monitoring

Nanoscale chemical mapping of laser-solubilized silk

Two-dimensional silk

Water Lithography: from Programmable Printing to Functional Patterning