Abstract:This study presents a hybrid thermal lithography method combining scalable microscale patterning based on direct‐write laser with nanoscale/ grayscale patterning based on thermal scanning probe lithography. This study demonstrates that the bio‐polymer silk fibroin shows excellent characteristics as positive tone resist and can be developed in DI water aiming for high‐resolution green‐nanomanufacturing. Silk fibroin (SF) is a natural material with polymorphic structures that determine its water solubility and biodegradability, which can be altered by exposing it to heat. Here, a hybrid thermal lithography method combining scalable microscale laser‐based patterning with nanoscale patterning based on thermal scanning probe lithography is developed. The latter enables in addition grayscale patterns to be made. The resolution limit of the writing in silk fibroin is studied by using a nanoscale heat source from a scanned nanoprobe. The heat thereby induces local water solubility change in the film, which can subsequently be developed in deionized water. Nanopatterns and grayscale patterns down to 50 nm lateral resolution are successfully written in the silk fibroin that behaves like a positive tone resist. The resulting patterned silk fibroin is then applied as a mask for dry etching of SiO2 to form a hard mask for further nano‐processing. A very high selectivity of 42:1 between SiO2 and silk fibroin is obtained allowing for high‐aspect ratio structure to be fabricated. The fabricated nanostructures have very low line edge roughness of 5 ± 2 nm. The results demonstrate the potential of silk fibroin as a water‐soluble resist for hybrid thermal lithography and precise micro/nanofabrication.

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Spectroscopic Characterization of Heterogeneous Structure of<i>Samia</i><i>c</i><i>ynthia</i><i>r</i><i>icini</i>Silk Fibroin Induced by Stretching and Molecular Dynamics Simulation

Nanoscale Probing of Electron-Regulated Structural Transitions in Silk Proteins by Near-Field IR Imaging and Nano-Spectroscopy

Micro/nano processing of natural silk fibers with near-field enhanced ultrafast laser

Secondary Structure Analysis of Single Silk Nanofibril Through Infrared Nanospectroscopy

Silk: Optical Properties over 12.6 Octaves THz-IR-Visible-UV Range

Structural information of biopolymer nanofibrils by infrared nanospectroscopy

Synchrotron Ftir Microspectroscopy of Single Natural Silk Fibers

In-situ Observation of Silk Nanofibril Assembly Via Graphene Plasmonic Infrared Sensor

Infrared nanospectroscopic mapping of DNA molecules on mica surface

Composites of Silk Nanofibrils and Metal-Organic Framework Nanosheets for Fluorescence-Based Sensing and UV Shielding

Micro and nano-scale compartments guide the structural transition of silk protein monomers into silk fibers

Ft-Raman And Ft-Ir Spectroscopic Studies Of Silk Fibroin

Multi‐ and Gray‐Scale Thermal Lithography of Silk Fibroin as Water‐Developable Resist for Micro and Nanofabrication

Aqueous Multiphoton Lithography with Multifunctional Silk-Centred Bio-Resists

A Silk‐Based Functionalization Architecture for Single Fiber Imaging and Sensing

Understanding Secondary Structures of Silk Materials via Micro- and Nano- Infrared Spectroscopies

Understanding Secondary Structures of Silk Materials Via Micro- and Nano-Infrared Spectroscopies.

Nano-FTIR spectroscopy reveals SiO2 densification within fs-laser induced nanogratings