Feature Fusion Based Hotspot Detection with R-EfficientNet

Chun Wang,Yi Fang,Sihai Zhang
DOI: https://doi.org/10.1145/3649476.3658707
2024-01-01
Abstract:Hotspot detection has become a challenging problem in modern Design For Manufacture (DFM) streams with the decreasing of the minimum feature size of chips. While machine learning has been widely and successfully employed for hotspot detection, its performance may still degrade if inaccurate feature extraction methods are used. In this paper, we propose a hotspot detection method that utilizes feature fusion with the R-EfficientNet model to address the aforementioned issues. Experimental results on ICCAD 2012 Contest benchmarks and ICCAD 2019 Contest benchmarks shows that the F1 score can be up to 0.724 and the false alarm rate is reduced to 22.69%. Compared with the most advanced machine learning-based methods, our proposed method achieves better performance.
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