Measurement of Microflow Rates Using Atomic Force Microscopy with a Long-Needle Probe

Zhengxiang Sun,Zhijian Liu,Zhe Sun
DOI: https://doi.org/10.1016/j.measurement.2024.115684
IF: 5.6
2025-01-01
Measurement
Abstract:This study presents a method to measure microflow rates using atomic force microscopy (AFM) with a long-needle probe. When the glass rod of the long-needle probe is immersed in the liquid, fluid drag twists the cantilever. The AFM's four-quadrant position-sensitive detector (PSD) detects the cantilever's lateral torsion and represents it through changes in output voltage. Measuring output voltage changes at known flow rates establishes a linear relationship between flow rate and voltage change. Therefore, this method measures unknown microflow rates by detecting changes in output voltage through a known linear relationship. This method reduces fluid perturbation as the probe's cross-sectional area ranges from 1 x 10(-3) to 8 x 10(-3) mm(2). At an immersion depth of 500 mu m, sensitivities reach 159.1 mV(mm/s)(-1). The method demonstrates a threshold velocity as low as 0.11 mm/s.
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