Abstract:In order to eliminate the dependence of the high-precision control of the piezoelectric driven com-pliant micro-positioning stage on its uncertain dynamic model,a data-driven model-free iterative feedforward compensation and adaptive notch filtering control method were proposed to improve the tracking performance of the stage.Firstly,a data-driven model-free iterative feedforward controller is established to improve the robustness of the system to noise and other interferences,and at the same time,the boundedness of the track-ing error with continuous reference input and the stability of the closed-loop system under the action of model-free iterative feed-forward are demonstrated.Secondly,an adaptive notch filter was constructed to eliminate the influence of stage resonance,a fast Fourier transform was performed on the error signal,and an online resonant frequency extraction algorithm was designed to realize the online real-time tuning of the notch filter parameters to further improve the trajectory tracking accuracy.Finally,the trajectory tracking experiment of the piezoelectric micro-motion stage was carried out by using the designed model-free iterative feedforward controller and adaptive notch filter.The experimental results show that when tracking the triangular wave signal,the maximum tracking error is reduced by 78.25%and 70.83%,respectively,compared with the PI controllor alone and the PI controllor combined with the adaptive notch filter,which can effectively improve the stability and trajectory tracking accuracy of the stage.

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