Abstract:Controlling thermal energy transfer at the nanoscale has become critically important in many applications and thermal properties since it often limits device performance. In this work, we study the effects on thermal conductivity arising from the nanoscale structure of free-standing nanocrystalline silicon films and the increasing surface-to-volume ratio when fabricated into suspended optomechanical nanobeams. We characterize thermal transport in structures with different grain sizes and elucidate the relative impact of grain size and geometrical dimensions on thermal conductivity. We use a micro-time-domain thermoreflectance method to study the impact of the grain size distribution, from 10 to 400 nm, on the thermal conductivity in free-standing nanocrystalline silicon films considering surface phonon and grain boundary scattering. We find a drastic reduction in the thermal conductivity, down to values of 10 W.m^{-1}.K^{-1} and below, which is just a fraction of the conductivity of single crystalline silicon. Decreasing the grain size further decreases the thermal conductivity. We also observe that this effect is smaller in OM nanostructures than in membranes due to the competition of surface scattering in decreasing thermal conductivity. Finally, we introduce a novel versatile contactless characterization technique that can be adapted to any structure supporting a thermally shifted optical resonance and use it to evaluate the thermal conductivity. This method can be used with optical resonances exhibiting different mode profiles and the data is shown to agrees quantitatively with the thermoreflectance measurements. This work opens the way to a more generalized thermal characterization of optomechanical cavities and to create hot-spots with engineered shapes at desired position in the structures as a means to study thermal transport in coupled photon-phonon structures.

Thermal conductivity of silicon nanomeshes: Effects of porosity and roughness

Effects of Pre-Stress and Surface Stress on Phonon Thermal Conductivity of Rectangular Si Nanowires

Thermal conductivity of disordered porous membranes

Thermal conductivity reduction in rough silicon nanomembranes

Monte Carlo simulations for phonon transport in silicon nanomaterials

Thermal Transport Properties of Nanoporous Silicon with Significant Specific Surface Area

Cross-plane Heat Conduction in Nanoporous Silicon Thin Films by Phonon Boltzmann Transport Equation and Monte Carlo Simulations

Heat current anticorrelation effects leading to thermal conductivity reduction in nanoporous Si

Ultralow thermal conductivity of single crystalline porous silicon nanowires

Multiscale phonon thermal transport in nano-porous silicon

Super-Suppression of Long Phonon Mean-Free-Paths in Nano-engineered Si due to Heat Current Anticorrelations

Thermal properties of nanocrystalline silicon nanobeams

Tuning the Thermal Conductivity of Silicon Phononic Crystals Via Defect Motifs: Implications for Thermoelectric Devices and Photovoltaics

Interfacial thermal resistance between porous layers: impact on thermal conductivity of a multilayered porous structure

Mitigating the Effect of Nanoscale Porosity on Thermoelectric Power Factor of Si

Nanoscale limit of the thermal conductivity in crystalline silicon carbide membranes, nanowires, and phononic crystals

Lattice Thermal Conductivity of Silicon and Germanium Core/Shell and Segmented Nanowires

Temperature-dependent thermal conductivity in nanoporous materials studied by the Boltzmann Transport Equation

Thermal Conductivity Of Nanocrystalline Silicon By Direct Molecular Dynamics Simulation

Anisotropic Heat Conduction in Two-Dimensional Periodic Silicon Nanoporous Films

The Effect of the Electron–phonon Coupling on the Thermal Conductivity of Silicon Nanowires