Design and Performance of a Thin-Film Lithium Niobate Modulator with a Sunken Electrode Structure

Hanyu Li,Yihui Yin,Xingpeng Liu,Haiou Li
DOI: https://doi.org/10.1109/CSRSWTC60855.2023.10427370
2023-01-01
Abstract:We demonstrate a Mach-Zehnder Interferometer (MZI) modulator characterized by a low voltage-length product, high 3-dB electro-optic (EO) bandwidth, and low light absorption loss. The sunken electrode structure enhances modulation efficiency, reduces optical loss, and allows the electrode to be positioned closer to the waveguide, thereby reducing it by orders of magnitude. This results in a highly efficient modulator. With an electrode gap of 5 um, the simulated voltage-length product is <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$1.94\ \mathrm{V}\cdot \text{cm}$</tex> , and the 3-dB bandwidth exceeds 60 GHz.
What problem does this paper attempt to address?