Lab on a beam—Big data and artificial intelligence in scanning transmission electron microscopy

Sergei V. Kalinin,Andrew R. Lupini,Ondrej Dyck,Stephen Jesse,Maxim Ziatdinov,Rama K. Vasudevan

DOI: https://doi.org/10.1557/mrs.2019.159

IF: 5

2019-07-01

MRS Bulletin

Abstract:Abstract

materials science, multidisciplinary,physics, applied

What problem does this paper attempt to address?

Towards data-driven next-generation transmission electron microscopy

Steven R. Spurgeon,Colin Ophus,Lewys Jones,Amanda Petford-Long,Sergei V. Kalinin,Matthew J. Olszta,Rafal E. Dunin-Borkowski,Norman Salmon,Khalid Hattar,Wei-Chang D. Yang,Renu Sharma,Yingge Du,Ann Chiaramonti,Haimei Zheng,Edgar C. Buck,Libor Kovarik,R. Lee Penn,Dongsheng Li,Xin Zhang,Mitsuhiro Murayama,Mitra L. Taheri

DOI: https://doi.org/10.1038/s41563-020-00833-z

IF: 41.2

2020-10-26

Nature Materials

Abstract:Electron microscopy touches on nearly every aspect of modern life, underpinning materials development for quantum computing, energy and medicine. We discuss the open, highly integrated and data-driven microscopy architecture needed to realize transformative discoveries in the coming decade.

materials science, multidisciplinary,chemistry, physical,physics, applied, condensed matter
Advanced Techniques in Automated High Resolution Scanning Transmission Electron Microscopy

Alexander Pattison,Cassio C.S. Pedroso,Bruce E. Cohen,Justin C. Ondry,A. Paul Alivisatos,Wolfgang Theis,Peter Ercius

2023-08-01

Abstract:Scanning transmission electron microscopy is a common tool used to study the atomic structure of materials. It is an inherently multimodal tool allowing for the simultaneous acquisition of multiple information channels. Despite its versatility, however, experimental workflows currently rely heavily on experienced human operators and can only acquire data from small regions of a sample at a time. Here, we demonstrate a flexible pipeline-based system for high-throughput acquisition of atomic-resolution structural data using a custom built sample stage and automation program. The program is capable of operating over many hours without human intervention improving the statistics of high-resolution experiments.

Instrumentation and Detectors
An Automated Scanning Transmission Electron Microscope Guided by Sparse Data Analytics

Matthew Olszta,Derek Hopkins,Kevin R Fiedler,Marjolein Oostrom,Sarah Akers,Steven R Spurgeon

DOI: https://doi.org/10.1017/S1431927622012065

2022-06-10

Abstract:Artificial intelligence (AI) promises to reshape scientific inquiry and enable breakthrough discoveries in areas such as energy storage, quantum computing, and biomedicine. Scanning transmission electron microscopy (STEM), a cornerstone of the study of chemical and materials systems, stands to benefit greatly from AI-driven automation. However, present barriers to low-level instrument control, as well as generalizable and interpretable feature detection, make truly automated microscopy impractical. Here, we discuss the design of a closed-loop instrument control platform guided by emerging sparse data analytics. We hypothesize that a centralized controller, informed by machine learning combining limited a priori knowledge and task-based discrimination, could drive on-the-fly experimental decision-making. This platform may unlock practical, automated analysis of a variety of material features, enabling new high-throughput and statistical studies.
Deep Learning for Automated Experimentation in Scanning Transmission Electron Microscopy

Sergei V. Kalinin,Debangshu Mukherjee,Kevin M. Roccapriore,Ben Blaiszik,Ayana Ghosh,Maxim A. Ziatdinov,A. Al-Najjar,Christina Doty,Sarah Akers,Nageswara S. Rao,Joshua C. Agar,Steven R. Spurgeon

DOI: https://doi.org/10.1038/s41524-023-01142-0

2023-04-05

Abstract:Machine learning (ML) has become critical for post-acquisition data analysis in (scanning) transmission electron microscopy, (S)TEM, imaging and spectroscopy. An emerging trend is the transition to real-time analysis and closed-loop microscope operation. The effective use of ML in electron microscopy now requires the development of strategies for microscopy-centered experiment workflow design and optimization. Here, we discuss the associated challenges with the transition to active ML, including sequential data analysis and out-of-distribution drift effects, the requirements for the edge operation, local and cloud data storage, and theory in the loop operations. Specifically, we discuss the relative contributions of human scientists and ML agents in the ideation, orchestration, and execution of experimental workflows and the need to develop universal hyper languages that can apply across multiple platforms. These considerations will collectively inform the operationalization of ML in next-generation experimentation.

Materials Science,Machine Learning
A Machine-Vision Approach to Transmission Electron Microscopy Workflows, Results Analysis and Data Management

Madeline Dressel Dukes,Nynke Albertine Krans,Katherine Marusak,Stamp Walden,Tim Eldred,Alan Franks,Ben Larson,Yaofeng Guo,David Nackashi,John Damiano

DOI: https://doi.org/10.3791/65446

2023-06-23

Abstract:Transmission electron microscopy (TEM) enables users to study materials at their fundamental, atomic scale. Complex experiments routinely generate thousands of images with numerous parameters that require time-consuming and complicated analysis. AXON synchronicity is a machine-vision synchronization (MVS) software solution designed to address the pain points inherent to TEM studies. Once installed on the microscope, it enables the continuous synchronization of images and metadata generated by the microscope, detector, and in situ systems during an experiment. This connectivity enables the application of machine-vision algorithms that apply a combination of spatial, beam, and digital corrections to center and track a region of interest within the field of view and provide immediate image stabilization. In addition to the substantial improvement in resolution afforded by such stabilization, metadata synchronization enables the application of computational and image analysis algorithms that calculate variables between images. This calculated metadata can be used to analyze trends or identify key areas of interest within a dataset, leading to new insights and the development of more sophisticated machine-vision capabilities in the future. One such module that builds on this calculated metadata is dose calibration and management. The dose module provides state-of-the-art calibration, tracking, and management of both the electron fluence (e-/Å2·s-1) and cumulative dose (e-/Å2) that is delivered to specific areas of the sample on a pixel-by-pixel basis. This enables a comprehensive overview of the interaction between the electron beam and the sample. Experiment analysis is streamlined through a dedicated analysis software in which datasets consisting of images and corresponding metadata are easily visualized, sorted, filtered, and exported. Combined, these tools facilitate efficient collaborations and experimental analysis, encourage data mining and enhance the microscopy experience.
Deep learning for electron and scanning probe microscopy: From materials design to atomic fabrication

Sergei V. Kalinin,Maxim Ziatdinov,Steven R. Spurgeon,Colin Ophus,Eric A. Stach,Toma Susi,Josh Agar,John Randall

DOI: https://doi.org/10.1557/s43577-022-00413-3

IF: 5

2022-11-04

MRS Bulletin

Abstract:Machine learning and artificial intelligence (ML/AI) are rapidly becoming an indispensable part of physics research, with applications ranging from theory and materials prediction to high-throughput data analysis. In parallel, the recent successes in applying ML/AI methods for autonomous systems from robotics through self-driving cars to organic and inorganic synthesis are generating enthusiasm for the potential of these techniques to enable automated and autonomous experiment in imaging. In this article, we discuss recent progress in application of machine learning methods in scanning transmission electron microscopy and scanning probe microscopy, from applications such as data compression and exploratory data analysis to physics learning to atomic fabrication.

materials science, multidisciplinary,physics, applied
High-resolution, high-throughput imaging with a multibeam scanning electron microscope

A.L. EBERLE,S. MIKULA,R. SCHALEK,J. LICHTMAN,M.L. KNOTHE TATE,D. ZEIDLER

DOI: https://doi.org/10.1111/jmi.12224

IF: 1.9522

2015-01-27

Journal of Microscopy

Abstract:Electron-electron interactions and detector bandwidth limit the maximal imaging speed of single-beam scanning electron microscopes. We use multiple electron beams in a single column and detect secondary electrons in parallel to increase the imaging speed by close to two orders of magnitude and demonstrate imaging for a variety of samples ranging from biological brain tissue to semiconductor wafers.

microscopy
Transmission electron imaging in the Delft multibeam scanning electron microscope 1

Yan Ren,Pieter Kruit

DOI: https://doi.org/10.1116/1.4966216

2016-11-01

Abstract:Our group is developing a multibeam scanning electron microscope (SEM) with 196 beams in order to increase the throughput of SEM. Three imaging systems using, respectively, transmission electron detection, secondary electron detection, and backscatter electron detection are designed in order to make it as versatile as a single beam SEM. This paper focuses on the realization of the transmission electron imaging system, which is motivated by biologists' interest in the particular contrast this can give. A thin sample is placed on fluorescent material which converts the transmitted electrons to photons. Then, the 196 photon beams are focused with a large magnification onto a camera via a high quality optical microscope integrated inside the vacuum chamber. Intensities of the transmission beams are retrieved from the camera images and constructed to form each beam's image using an off line image processing program. Experimental results prove the working principle of transmission electron imaging and show that details of 10–20 nm in images of biological specimen are visible. Problems encountered in the results are discussed and plans for future improvements are suggested.

engineering, electrical & electronic,nanoscience & nanotechnology,physics, applied
Computational ghost imaging for transmission electron microscopy

Akhil Kallepalli,Lorenzo Viani,Daan Stellinga,Enzo Rotunno,Ming-Jie Sun,Richard Bowman,Paolo Rosi,Stefano Frabboni,Roberto Balboni,Andrea Migliori,Vincenzo Grillo,Miles Padgett

DOI: https://doi.org/10.48550/arXiv.2204.09997

2022-04-21

Abstract:While transmission electron microscopes (TEM) can achieve a much higher resolution than optical microscopes, they face challenges of damage to samples during the high energy processes involved. Here, we explore using computational ghost imaging techniques in electron microscopy to reduce the total required intensity. The technological lack of the equivalent high-resolution, optical spatial light modulator for electrons means that a different approach needs to be pursued. To this end, we show a beam shaping technique based on the use of a distribution of electrically charged metal needles to structure the beam, alongside a novel reconstruction method to handle the resulting highly non-orthogonal patterns. Second, we illustrate the application of this ghost imaging approach in electron microscopy. To test the full extent of the capabilities of this technique, we realised an analogous optical setup method. In both regimes, the ability to reduce the amount of total illumination intensity is evident in comparison to raster scanning.

Optics,Mesoscale and Nanoscale Physics,Biological Physics,Instrumentation and Detectors,Quantum Physics
Deep Learning of Atomically Resolved Scanning Transmission Electron Microscopy Images: Chemical Identification and Tracking Local Transformations

Maxim Ziatdinov,Ondrej Dyck,Artem Maksov,Xufan Li,Xiahan Sang,Kai Xiao,Raymond R. Unocic,Rama Vasudevan,Stephen Jesse,Sergei V. Kalinin

DOI: https://doi.org/10.48550/arXiv.1801.05860

2018-01-17

Materials Science

Abstract:Recent advances in scanning transmission electron and scanning probe microscopies have opened exciting opportunities in probing the materials structural parameters and various functional properties in real space with angstrom-level precision. This progress has been accompanied by an exponential increase in the size and quality of datasets produced by microscopic and spectroscopic experimental techniques. These developments necessitate adequate methods for extracting relevant physical and chemical information from the large datasets, for which a priori information on the structures of various atomic configurations and lattice defects is limited or absent. Here we demonstrate an application of deep neural networks to extract information from atomically resolved images including location of the atomic species and type of defects. We develop a 'weakly-supervised' approach that uses information on the coordinates of all atomic species in the image, extracted via a deep neural network, to identify a rich variety of defects that are not part of an initial training set. We further apply our approach to interpret complex atomic and defect transformation, including switching between different coordination of silicon dopants in graphene as a function of time, formation of peculiar silicon dimer with mixed 3-fold and 4-fold coordination, and the motion of molecular 'rotor'. This deep learning based approach resembles logic of a human operator, but can be scaled leading to significant shift in the way of extracting and analyzing information from raw experimental data.
Advances in sparse dynamic scanning in spectromicroscopy through compressive sensing

George Kourousias,Fulvio Billè,Francesco Guzzi,Matteo Ippoliti,Valentina Bonanni,Alessandra Gianoncelli

DOI: https://doi.org/10.1371/journal.pone.0285057

IF: 3.7

2023-11-09

PLoS ONE

Abstract:Scanning microscopies and spectroscopies like X-ray Fluorescence (XRF), Scanning Transmission X-ray Microscopy (STXM), and Ptychography are of very high scientific importance as they can be employed in several research fields. Methodology and technology advances aim at analysing larger samples at better resolutions, improved sensitivities and higher acquisition speeds. The frontiers of those advances are in detectors, radiation sources, motors, but also in acquisition and analysis software together with general methodology improvements. We have recently introduced and fully implemented an intelligent scanning methodology based on compressive sensing, on a soft X-ray microscopy beamline. This demonstrated sparse low energy XRF scanning of dynamically chosen regions of interest in combination with STXM, yielding spectroimaging data in the megapixel-range and in shorter timeframes than were previously not feasible. This research has been further developed and has been applied to scientific applications in biology. The developments are mostly in the dynamic triggering decisional mechanism in order to incorporate modern Machine Learning (ML) but also in the suitable integration of the method in the control system, making it available for other beamlines and imaging techniques. On the applications front, the method was previously successfully used on different samples, from lung and ovarian human tissues to plant root sections. This manuscript introduces the latest methodology advances and demonstrates their applications in life and environmental sciences. Lastly, it highlights the auxiliary development of a mobile application, designed to assist the user in the selection of specific regions of interest in an easy way.
Probing electron beam induced transformations on a single defect level via automated scanning transmission electron microscopy

Kevin M. Roccapriore,Matthew G. Boebinger,Ondrej Dyck,Ayana Ghosh,Raymond R. Unocic,Sergei V. Kalinin,Maxim Ziatdinov

DOI: https://doi.org/10.48550/arXiv.2207.12882

2022-07-26

Abstract:The robust approach for real-time analysis of the scanning transmission electron microscopy (STEM) data streams, based on the ensemble learning and iterative training (ELIT) of deep convolutional neural networks, is implemented on an operational microscope, enabling the exploration of the dynamics of specific atomic configurations under electron beam irradiation via an automated experiment in STEM. Combined with beam control, this approach allows studying beam effects on selected atomic groups and chemical bonds in a fully automated mode. Here, we demonstrate atomically precise engineering of single vacancy lines in transition metal dichalcogenides and the creation and identification of topological defects graphene. The ELIT-based approach opens the pathway toward the direct on-the-fly analysis of the STEM data and engendering real-time feedback schemes for probing electron beam chemistry, atomic manipulation, and atom by atom assembly.

Disordered Systems and Neural Networks,Materials Science
Artificial Intelligence End-to-End Workflow for Transmission Electron Microscopy: From Data Analysis Automation to Materials Knowledge Unveiling

Marc Botifoll,Ivan Pinto-Huguet,Enzo Rotunno,Thomas Galvani,Catalina Coll,Payam Habibzadeh Kavkani,Maria Chiara Spadaro,Yann-Michel Niquet,Martin Børstad Eriksen,Sara Martí-Sánchez,Georgios Katsaros,Giordano Scappucci,Peter Krogstrup,Giovanni Isella,Andreu Cabot,Gonzalo Merino,Pablo Ordejón,Stephan Roche,Vincenzo Grillo,Jordi Arbiol

2024-11-02

Abstract:This article introduces a groundbreaking analytical workflow designed for the holistic characterisation, modelling and physical simulation of device heterostructures. Our innovative workflow autonomously, comprehensively and locally characterises the crystallographic information and 3D orientation of the crystal phases, the elemental composition, and the strain maps of devices from (scanning) transmission electron microscopy data. It converts a manual characterisation process that traditionally takes days into an automatic routine completed in minutes. This is achieved through a physics-guided artificial intelligence model that combines unsupervised and supervised machine learning in a modular way to provide a representative 3D description of the devices, materials structures, or samples under analysis. To culminate the process, we integrate the extracted knowledge to automate the generation of both 3D finite element and atomic models of millions of atoms acting as digital twins, enabling simulations that yield essential physical and chemical insights crucial for understanding the device's behaviour in practical applications. We prove this end-to-end workflow with a state-of-the-art materials platform based on SiGe planar heterostructures for hosting coherent and scalable spin qubits. Our workflow connects representative digital twins of the experimental devices with their theoretical properties to reveal the true impact that every atom in the structure has on their electronic properties, and eventually, into their functional quantum performance. Notably, the versatility of our workflow is demonstrated through its successful application to a wide array of materials systems, device configurations and sample morphologies.

Materials Science
Realizing smart scanning transmission electron microscopy using high performance computing

Utkarsh Pratiush,Austin Houston,Sergei V Kalinin,Gerd Duscher

DOI: https://doi.org/10.1063/5.0225401

2024-10-01

Abstract:Scanning Transmission Electron Microscopy (STEM) coupled with Electron Energy Loss Spectroscopy (EELS) presents a powerful platform for detailed material characterization via rich imaging and spectroscopic data. Modern electron microscopes can access multiple length scales and sampling rates far beyond human perception and reaction time. Recent advancements in machine learning (ML) offer a promising avenue to enhance these capabilities by integrating ML algorithms into the STEM-EELS framework, fostering an environment of active learning. This work enables the seamless integration of STEM with High-Performance Computing (HPC) systems. This integration is facilitated by our developed server software, written in Python, which acts as a wrapper over DigitalMicrograph (version 3.5) hardware modules to enable remote computer interactions. We present several implemented workflows that exemplify this integration. These workflows include sophisticated techniques such as object finding and deep kernel learning. Through these developments, we demonstrate how the fusion of STEM-EELS with ML and HPC enhances the efficiency and scope of material characterization for all of STEM available globally having Gatan, Inc. image filter installed on them. The codes are available on GitHub.
Closing the loop: Autonomous experiments enabled by machine-learning-based online data analysis in synchrotron beamline environments

Linus Pithan,Vladimir Starostin,David Mareček,Lukas Petersdorf,Constantin Völter,Valentin Munteanu,Maciej Jankowski,Oleg Konovalov,Alexander Gerlach,Alexander Hinderhofer,Bridget Murphy,Stefan Kowarik,Frank Schreiber

2023-06-21

Abstract:Recently, there has been significant interest in applying machine learning (ML) techniques to X-ray scattering experiments, which proves to be a valuable tool for enhancing research that involves large or rapidly generated datasets. ML allows for the automated interpretation of experimental results, particularly those obtained from synchrotron or neutron facilities. The speed at which ML models can process data presents an important opportunity to establish a closed-loop feedback system, enabling real-time decision-making based on online data analysis. In this study, we describe the incorporation of ML into a closed-loop workflow for X-ray reflectometry (XRR), using the growth of organic thin films as an example. Our focus lies on the beamline integration of ML-based online data analysis and closed-loop feedback. We present solutions that provide an elementary data analysis in real time during the experiment without introducing the additional software dependencies in the beamline control software environment. Our data demonstrates the accuracy and robustness of ML methods for analyzing XRR curves and Bragg reflections and its autonomous control over a vacuum deposition setup.

Data Analysis, Statistics and Probability,Materials Science,Machine Learning,Applied Physics
Signal Processing Challenges and Examples for {\it in-situ} Transmission Electron Microscopy

Josh Kacher,Yao Xie,Sven P. Voigt,Shixiang Zhu,Henry Yuchi,Jordan Key,Surya R. Kalidindi

DOI: https://doi.org/10.48550/arXiv.2104.08688

2021-08-21

Abstract:Transmission Electron Microscopy (TEM) is a powerful tool for imaging material structure and characterizing material chemistry. Recent advances in data collection technology for TEM have enabled high-volume and high-resolution data collection at a microsecond frame rate. Taking advantage of these advances in data collection rates requires the development and application of data processing tools, including image analysis, feature extraction, and streaming data processing techniques. In this paper, we highlight a few areas in materials science that have benefited from combining signal processing and statistical analysis with data collection capabilities in TEM and present a future outlook on opportunities of integrating signal processing with automated TEM data analysis.

Computer Vision and Pattern Recognition
Linking the Dynamic PicoProbe Analytical Electron-Optical Beam Line / Microscope to Supercomputers

Alexander Brace,Rafael Vescovi,Ryan Chard,Nickolaus D. Saint,Arvind Ramanathan,Nestor J. Zaluzec,Ian Foster

2023-08-26

Abstract:The Dynamic PicoProbe at Argonne National Laboratory is undergoing upgrades that will enable it to produce up to 100s of GB of data per day. While this data is highly important for both fundamental science and industrial applications, there is currently limited on-site infrastructure to handle these high-volume data streams. We address this problem by providing a software architecture capable of supporting large-scale data transfers to the neighboring supercomputers at the Argonne Leadership Computing Facility. To prepare for future scientific workflows, we implement two instructive use cases for hyperspectral and spatiotemporal datasets, which include: (i) off-site data transfer, (ii) machine learning/artificial intelligence and traditional data analysis approaches, and (iii) automatic metadata extraction and cataloging of experimental results. This infrastructure supports expected workloads and also provides domain scientists the ability to reinterrogate data from past experiments to yield additional scientific value and derive new insights.

Distributed, Parallel, and Cluster Computing,Artificial Intelligence
Human-in-the-loop: The future of Machine Learning in Automated Electron Microscopy

Sergei V. Kalinin,Yongtao Liu,Arpan Biswas,Gerd Duscher,Utkarsh Pratiush,Kevin Roccapriore,Maxim Ziatdinov,Rama Vasudevan

2023-10-08

Abstract:Machine learning methods are progressively gaining acceptance in the electron microscopy community for de-noising, semantic segmentation, and dimensionality reduction of data post-acquisition. The introduction of the APIs by major instrument manufacturers now allows the deployment of ML workflows in microscopes, not only for data analytics but also for real-time decision-making and feedback for microscope operation. However, the number of use cases for real-time ML remains remarkably small. Here, we discuss some considerations in designing ML-based active experiments and pose that the likely strategy for the next several years will be human-in-the-loop automated experiments (hAE). In this paradigm, the ML learning agent directly controls beam position and image and spectroscopy acquisition functions, and human operator monitors experiment progression in real- and feature space of the system and tunes the policies of the ML agent to steer the experiment towards specific objectives.

Materials Science,Machine Learning,Image and Video Processing
Materials Structure, Properties and Dynamics through Scanning Transmission Electron Microscopy

Stephen J. Pennycook,Changjian Li,Mengsha Li,Chunhua Tang,Eiji Okunishi,Maria Varela,Young-Min Kim,Jae Hyuck Jang

DOI: https://doi.org/10.1186/s40543-018-0142-4

2019-08-20

Abstract:Scanning transmission electron microscopy (STEM) has advanced rapidly in the last decade thanks to the ability to correct the major aberrations of the probe forming lens. Now atomic-sized beams are routine, even at accelerating voltages as low as 40 kV, allowing knock-on damage to be minimized in beam sensitive materials. The aberration-corrected probes can contain sufficient current for high quality, simultaneous, imaging and analysis in multiple modes. Atomic positions can be mapped with picometer precision, revealing ferroelectric domain structures, composition can be mapped by energy dispersive X-ray spectroscopy (EDX) and electron energy loss spectroscopy (EELS) and charge transfer can be tracked unit cell by unit cell using the EELS fine structure. Furthermore, dynamics of point defects can be investigated through rapid acquisition of multiple image scans. Today STEM has become an indispensable tool for analytical science at the atomic level, providing a whole new level of insights into the complex interplays that control materials properties.

Materials Science
Exploring electron-beam induced modifications of materials with machine-learning assisted high temporal resolution electron microscopy

Matthew G. Boebinger,Ayana Ghosh,Kevin M. Roccapriore,Sudhajit Misra,Kai Xiao,Stephen Jesse,Maxim Ziatdinov,Sergei V. Kalinin,Raymond R. Unocic

DOI: https://doi.org/10.1038/s41524-024-01448-7

IF: 12.256

2024-11-21

npj Computational Materials

Abstract:Directed atomic fabrication using an aberration-corrected scanning transmission electron microscope (STEM) opens new pathways for atomic engineering of functional materials. In this approach, the electron beam is used to actively alter the atomic structure through electron beam induced irradiation processes. One of the impediments that has limited widespread use thus far has been the ability to understand the fundamental mechanisms of atomic transformation pathways at high spatiotemporal resolution. Here, we develop a workflow for obtaining and analyzing high-speed spiral scan STEM data, up to 100 fps, to track the atomic fabrication process during nanopore milling in monolayer MoS 2 . An automated feedback-controlled electron beam positioning system combined with deep convolution neural network (DCNN) was used to decipher fast but low signal-to-noise datasets and classify time-resolved atom positions and nature of their evolving atomic defect configurations. Through this automated decoding, the initial atomic disordering and reordering processes leading to nanopore formation was able to be studied across various timescales. Using these experimental workflows a greater degree of speed and information can be extracted from small datasets without compromising spatial resolution. This approach can be adapted to other 2D materials systems to gain further insights into the defect formation necessary to inform future automated fabrication techniques utilizing the STEM electron beam.

materials science, multidisciplinary,chemistry, physical

Lab on a beam—Big data and artificial intelligence in scanning transmission electron microscopy

Towards data-driven next-generation transmission electron microscopy

Advanced Techniques in Automated High Resolution Scanning Transmission Electron Microscopy

An Automated Scanning Transmission Electron Microscope Guided by Sparse Data Analytics

Deep Learning for Automated Experimentation in Scanning Transmission Electron Microscopy

A Machine-Vision Approach to Transmission Electron Microscopy Workflows, Results Analysis and Data Management

Deep learning for electron and scanning probe microscopy: From materials design to atomic fabrication

High-resolution, high-throughput imaging with a multibeam scanning electron microscope

Transmission electron imaging in the Delft multibeam scanning electron microscope 1

Computational ghost imaging for transmission electron microscopy

Deep Learning of Atomically Resolved Scanning Transmission Electron Microscopy Images: Chemical Identification and Tracking Local Transformations

Advances in sparse dynamic scanning in spectromicroscopy through compressive sensing

Probing electron beam induced transformations on a single defect level via automated scanning transmission electron microscopy

Artificial Intelligence End-to-End Workflow for Transmission Electron Microscopy: From Data Analysis Automation to Materials Knowledge Unveiling

Realizing smart scanning transmission electron microscopy using high performance computing

Closing the loop: Autonomous experiments enabled by machine-learning-based online data analysis in synchrotron beamline environments

Signal Processing Challenges and Examples for {\it in-situ} Transmission Electron Microscopy

Linking the Dynamic PicoProbe Analytical Electron-Optical Beam Line / Microscope to Supercomputers

Human-in-the-loop: The future of Machine Learning in Automated Electron Microscopy

Materials Structure, Properties and Dynamics through Scanning Transmission Electron Microscopy

Exploring electron-beam induced modifications of materials with machine-learning assisted high temporal resolution electron microscopy