Abstract:The waveguide chip with a phase measurement function has garnered significant attention in the field of imaging optics, emerging as a crucial component in optical interferometric imaging systems. Enhancing the working bandwidth of these waveguide chips is essential for improving the imaging quality of interferometric systems. However, most existing designs primarily focus on narrow bands, with no reported research on broadband designs. This paper introduces a novel broadband waveguide chip design that incorporates a phase measurement function. We explore the fundamental structure and working principle of this innovative design. Fabricated on a silicon substrate, the chip features a silicon dioxide cladding layer and a germanium-doped silicon dioxide core layer, strategically optimized for performance. Utilizing the Beam Propagation Method (BPM), we conduct detailed simulations to determine the optimal device parameters. The simulation results demonstrate the effectiveness of our design, showing a phase measurement deviation of approximately 5° at a center wavelength of 1550 nm across a 300 nm wavelength range. The loss of the device is approximately 0.8 dB. These findings provide a solid foundation for future experimental implementations and fabrications, offering both a theoretical framework and technical reference for advancing the practical use of broadband waveguide chips with phase measurement functions in optical interferometric imaging.

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