Abstract:It is important study identification method which is applied in multiple input multiple output (MIMO) motion system with flexible structures in theory and practical application. In the past MIMO motion system was usually assumed as rigid body in dynamical modeling. However, the flexible dynamics characteristics will become more and more significant, and become the important factor of limiting the system performance, with the requirements of structure design and control performance enhancing unceasingly. An identification method, which is used to identify the MIMO motion system with flexible structure, is proposed. In this method, nonparametric model is obtained through frequency domain identification experiment, and MIMO transfer function matrix with same the denominator is obtained through the general parameters orthogonal polynomial curve fitting, at last the state space model of MIMO system is obtained through the modal superposition principle of flexible structure and singular value decomposition (SVD) principle. This method has been applied at wafer stage of lithographic equipment which is a typical MIMO motion system with flexible dynamics characteristics. The final MIMO state space model has equal precision with frequency domain identification model, which validates the effectiveness of the proposed identification method. And the obtained model could satisfy the requirement of integrated control design.

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