A Rapid Gas-Nitridation Technology

Meng Li
2002-01-01
Abstract:A rapid gasnitridation technology has been developed through some technological measures such as the preoxydization, the control of the amount of nitride, the inlet of high purity nitride in the difusion period, and the denitridation, etc, the nitrisation time of which was shortened from 50 hours to 35 hours.
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