Abstract:As one of the magnetic transition metal oxides, SrRuO3 (SRO) has received much attention in recent years, which is mainly due to its unique itinerate ferromagnetism and the unusual electrical transport properties–behaving as Fermi liquid at low temperature and bad metal at high temperature. In the growth of SRO thin films, there are many factors that can affect the quality of thin films. In this work, we study various factors affecting the growth and quality of SRO thin films by using laser molecular beam epitaxy (laser MBE), including laser energy density, substrate temperature and target surface conditions, and explore their influences on the topological Hall effect (THE) in SRO. For thin films grown at high laser energy density and high temperature, we found that there are large trenches at the edge of steps, which deteriorate the transport properties of the thin films. When using low laser energy density, extra SrO may exist in the films, which also suppresses the conductivity. Films grown at low temperature tend to have poor crystallinity while films grown at high temperature exhibit island structures. The ablation degree of the target surface increases the decomposition of SRO to SrO, Ru and volatile RuO4, resulting in Ru defects in the grown thin film. The SRO thin film grown under the optimal conditions (1.75 J·cm–2, 670 ℃, fresh target surface) exhibits the optimal conductivity and the strongest THE. For non-optimal growth conditions that favors thickness inhomogeneity or Ru defects in the film, THE becomes weaker or even disappears. Therefore, we believe that the THE is due to the Dzyaloshinskii-Moriya interaction (DMI) resulting from the interfacial inversion asymmetry and the associated chiral spin structures.

Microstructure of (110)-Oriented Epitaxial SrRuO3 Thin Films Grown on Off-Cut Single Crystal YSZ(100) Substrates

Synthesis of YSZ film by solid single source PE-MOCVD method and characterization

TEM Study of SrIrO3 Thin Films with Various Thicknesses Grown on (001) SrTiO3 Substrates Synthesized by Pulsed Laser Deposition

Surface Microstructures Of Ferroelectric Srbi2ta2o9, Batio3 And Metallic Srruo3 Epitaxial Thin Films

The Microstructure and Magnetic Property of TiO2‐terminated SrTiO3 Substrate Selected Growth Cubic Phase CaRuO3 Film

Investigation of the Growth Mechanism of SrRuO3thin Films Fabricated by Pulsed Laser Deposition

Epitaxial Srruo3 Thin Films on (001) Srtio3

Direct visualization and control of SrOx segregation on semiconducting Nb doped SrTiO3 (100) surface

Ex-situ atomic force microscopy on the growth mode of SrRuO3 epitaxial thin film

SrRuO3 under tensile strain: Thickness-dependent electronic and magnetic properties

Reducing Azimuthal Domains in (100)or (118)-Oriented Ferroelectric Bi3.25la0.75ti3o12 Films Using Off-Cut Single Crystal Substrates

Structural and electrical properties of (110) ZnO epitaxial thin films on (001) SrTiO3 substrates

Quasi‐Two‐Dimensional Ferromagnetic SrRuO3 Grown by Pulsed Laser Deposition with Layer‐by‐Layer Growth Fashion

Thickness and temperature dependence of the atomic-scale structure of SrRuO$_3$ thin films

Strain-induced single-domain growth of epitaxial SrRuO3 layers on SrTiO3: a high-temperature x-ray diffraction study

Anomalous strain effect in heteroepitaxial SrRuO<sub>3</sub> films on (111) SrTiO<sub>3</sub> substrates

Surface termination effect of SrTiO3 substrate on ultrathin SrRuO3

Initial Growth of Bi4 Lati3 Feo15 Thin Films on Srtio3, Mgo and Ysz Substrates

Microstructure of Epitaxial Er2o3 Thin Film on Oxidized Si(111) Substrate

Correlation of Preparation Conditions of SrRuO<sub>3</sub> Ultrathin Films with Topological Hall Effect

Nanoscale domain engineering in SrRuO$_3$ thin films