ANALYSIS ON DYNAMIC CHARACTERISTICS OF TORSIONAL MICROMIRROR MODEL WITH CONSIDERATION OF EDGE EFFECTS

Jidong Lu
2007-01-01
Abstract:In oder to be in keeping with the real condition of torsional micromirror, the improved formulas for electrostatic force in finite scale parallel plate capacitor are introduced and the edge effects are taken into account. Owing to the edge effects, the electro-driving force and the torsional deformation of torsional micromirror system become very complicated and their analytical expressions would be very difficult to be obtained. Therefore, the numerical integration procedure and an iterative refinement homogeneous capacity high precision integration method (IRHCHPIM) are employed to solve the non-linear dynamic equations, which can achieve a stable and high precise numerical solution. The calculated results show that the dynamic responses will increase when the edge effects are considered, and the scale parameters of the torsional micromirror are in close relation to edge effects.
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