Ultrahigh‐Resolution Transmission Electron Microscopy at Negative Spherical Aberration

K. Urban,Juri Barthel,Lothar Houben,Chun‐Lin Jia,M. Lentzen,A. Thust,Karsten Tillmann

DOI: https://doi.org/10.1002/9783527641864.ch3

2012-01-01

Abstract:This chapter contains sections titled: Introduction The Principles of Atomic-Resolution Imaging Inversion of the Imaging Process Case Study: SrTiO3 Practical Examples of Application of NCSI Imaging References

What problem does this paper attempt to address?

Negative Spherical Aberration Ultrahigh-Resolution Imaging in Corrected Transmission Electron Microscopy

K. Urban,Chun‐Lin Jia,Lothar Houben,M. Lentzen,Shao‐Bo Mi,Karsten Tillmann

DOI: https://doi.org/10.1098/rsta.2009.0134

2009-01-01

Abstract:Aberration-corrected transmission electron microscopy allows us to image the structure of matter at genuine atomic resolution. A prominent role for the imaging of crystalline samples is played by the negative spherical aberration imaging (NCSI) technique. The physical background of this technique is reviewed. The especially high contrast observed under these conditions owes its origin to an enhancing combination of amplitude contrast due to electron diffraction channelling and phase contrast. A number of examples of the application of NCSI are reviewed in order to illustrate the applicability and the state-of-the-art of this technique.
High-resolution transmission electron microscopy using negative spherical aberration.

Chun-Lin Jia,Markus Lentzen,Knut Urban

DOI: https://doi.org/10.1017/S1431927604040425

IF: 4.0991

2004-01-01

Microscopy and Microanalysis

Abstract:A novel imaging mode for high-resolution transmission electron microscopy is described. It is based on the adjustment of a negative value of the spherical aberration C-S of the objective lens of a transmission electron microscope equipped with a multipole aberration corrector system. Negative spherical aberration applied together with an overfocus yields high-resolution images with bright-atom contrast. Compared to all kinds of images taken in conventional transmission electron microscopes, where the then unavoidable positive spherical aberration is combined with an underfocus, the contrast is dramatically increased. This effect can only be understood on the basis of a full nonlinear imaging theory. Calculations show that the nonlinear contrast contributions diminish the image contrast relative to the linear image for a positive-C-S setting whereas they reinforce the image contrast relative to the linear image for a negative-C-S setting. The application of the new mode to the imaging of oxygen in SrTiO3 and YBa2Cu3O7 demonstrates the benefit to materials science investigations. It allows us to image directly, without further image processing, strongly scattering heavy-atom columns together with weakly scattering light-atom columns.
Aberrations in Structured Illumination Microscopy: A Theoretical Analysis

Xin Liu,Shijie Tu,Yan Xu,Hongya Song,Wenjie Liu,Qiulan Liu,Cuifang Kuang,Xu Liu,Xiang Hao

DOI: https://doi.org/10.3389/fphy.2019.00254

IF: 3.718

2020-01-01

Frontiers in Physics

Abstract:In super-resolution optical microscopes, aberrations often compromise the image performances by reducing its resolution and contrast. In previous works, the aberrations in stimulated emission depletion (STED) microscopy and single-molecule localization microscopy (SMLM) have been well-investigated, while the research on the aberrations in structured illumination microscopy (SIM) is not sufficient, the researchers always poured attention into aberrations only in the detection path. In this paper, we investigate the aberrations in SIM in a comprehensive manner, and their causes and effects on both the illumination and the detection paths are discussed. The aberrations in the illumination path may distort illumination patterns, and deteriorate the final images, together with the aberrations in the detection path. In addition, several non-aberration-related factors, especially the misalignment of the incident beams with respect to the objective pupil, can also dramatically influence the performances of SIM. The analysis provides the theoretical basis and for optimizing a SIM system.
On the Benefit of the Negative-Spherical-Aberration Imaging Technique for Quantitative Hrtem

C. L. Jia,L. Houben,A. Thust,J. Barthel

DOI: https://doi.org/10.1016/j.ultramic.2009.10.006

IF: 2.994

2010-01-01

Ultramicroscopy

Abstract:Employing an aberration corrector in a high-resolution transmission electron microscope, the spherical aberration CS can be tuned to negative values, resulting in a novel imaging technique, which is called the negative CS imaging (NCSI) technique. The image contrast obtained with the NCSI technique is compared quantitatively with the image contrast formed with the traditional positive CS imaging (PCSI) technique. For the case of thin objects negative CS images are superior to positive CS images concerning the magnitude of the obtained contrast, which is due to constructive rather than destructive superposition of fundamental contrast contributions. As a consequence, the image signal obtained with a negative spherical aberration is significantly more robust against noise caused by amorphous surface layers, resulting in a measurement precision of atomic positions which is by a factor of 2–3 better at an identical noise level. The quantitative comparison of the two alternative CS-corrected imaging modes shows that the NCSI mode yields significantly more precise results in quantitative high-resolution transmission electron microscopy of thin objects than the traditional PCSI mode.
Progress in Aberration-Corrected High-Resolution Transmission Electron Microscopy of Crystalline Solids

K Tillmann,J Barthel,L Houben,C L Jia,M Lentzen,A Thust,K Urban

DOI: https://doi.org/10.1007/978-1-4020-8615-1_30

2008-01-01

Abstract:With impressive improvements in instrumental resolution and a Simultaneous minimisation of image delocalisation, high-resolution transmission electron microscopy is presently enjoying increased popularity in the atomic-scale imaging of lattice imperfections in a variety of solids. In the present overview, recent progress in spherical aberration corrected imaging performed in troika with the ultra-precise measurement of residual wave aberrations and the numerical retrieval of the exit plane wavefunction from focal series of micrographs is illustrated by highlighting their combined use for the atomic-scale measurement of common lattice imperfections observed in compound semiconductors and high-temperature superconductors.
Aberration-Corrected High-Resolution Transmission Electron Microscopy and Its Applications in Functional Oxides

Shaobo MI,Chunlin JIA

DOI: https://doi.org/10.7502/j.issn.1674-3962.2017.07.10

2017-01-01

Abstract:In the present review paper we introduce an imaging technique based on aberration-corrected TEM,the negative CS imaging (NCSI) technique,which results in a high-contrast of image in comparison with conventional positive CS imaging (PCSI) technique.The novel NSCI technique has been applied for not only acquiring high-contrast atomic-resolution structure images of materials,but also determining the relative shifts of atomic columns with a precision of a few picometres.In addition,the NCSI technique provides experimental basis for quantitative analysis of the fine changes of atoms including light elements (e.g.oxygen) in oxide materials,e.g.the electric dipoles,domains and domain walls in oxide ferroelectrics,interfaces in heterostructural multilayer films as well as the 3D shape of a nanoscale MgO crystal.
High-Resolution Imaging with an Aberration-Corrected Transmission Electron Micrscope

M. Lentzen,B. Jahnen,C.L. Jia,K. Urban

DOI: https://doi.org/10.1017/s1431927600030592

IF: 4.0991

2001-01-01

Microscopy and Microanalysis

Abstract:In electron microscopy high-resolution imaging of finest object structures is generally hampered by the influence of aberrations of the lens system, especially the high spherical aberration of the objective lens. The delocalization of contrast details induced by aberrations is especially strong for microscopes equipped with a field emission gun providing a high spatial coherence. in recent years a prototype of an aberration correction system has been constructed by Haider et al., following a suggestion by Rose, consisting of two hexapole elements and four additional round lenses. The correction system was adapted to a Philips CM 200 FEG ST microscope with an information limit of 0.13 nm. The alignment is carried out using aberration measurements deduced from Zemlin tableaus. By appropriately exciting the hexapole elements it is possible to reduce or even fully compensate the spherical aberration of the objective lens. With the freedom of a variable spherical aberration C s new operation modes can be accessed that are not available in standard microscopes. with C s = 0 and defocus Z = 0 pure amplitude contrast occurs, together with a vanishing contrast delocalization; phase contrast with a single, narrow pass-band up to the information limit can still be achieved by Z = ±7 nm, which introduces a delocalization of R = 0.13 nm. with Cs = 97 μm and Z = −18 nm the broad Scherzer pass-band for phase contrast can be extended to the information limit, with R = 0.35 nm. For the CM 200 C s = 43 fim and Z = −12 nm still produces a high level of phase contrast, comparable with the extended Scherzer pass-band, but with R = 0.08 nm only. in the latter mode Scherzer’s defocus equals Lichte's defocus of least confusion.
Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

G. Behan,E. C. Cosgriff,Angus I. Kirkland,Peter D. Nellist

DOI: https://doi.org/10.1098/rsta.2009.0074

2009-09-28

Abstract:The depth resolution for optical sectioning in the scanning transmission electron microscope is measured using the results of optical sectioning experiments of laterally extended objects. We show that the depth resolution depends on the numerical aperture of the objective lens as expected. We also find, however, that the depth resolution depends on the lateral extent of the object that is being imaged owing to a missing cone of information in the transfer function. We find that deconvolution methods generally have limited usefulness in this case, but that three-dimensional information can still be obtained with the aid of prior information for specific samples such as those consisting of supported nanoparticles. We go on to review how a confocal geometry may improve the depth resolution for extended objects. Finally, we present a review of recent work exploring the effect of dynamical diffraction in zone-axis-aligned crystals on the optical sectioning process.
Progress in Atomic-Resolution Aberration Corrected Conventional Transmission Electron Microscopy (CTEM)

K. Urban,Juri Barthel,Lothar Houben,Chun‐Lin Jia,Lei Jin,M. Lentzen,Shao‐Bo Mi,A. Thust,Karsten Tillmann

DOI: https://doi.org/10.1016/j.pmatsci.2022.101037

2023-01-01

Abstract:Transmission electron microscopy is an indispensable tool in modern materials science. It enables the structure of materials to be studied with high spatial resolution, and thus makes a decisive contribution to the fact that it is now possible to understand the microstructure-related physical and chemical characteristics and to correlate these with the macroscopic materials properties. It was tantamount to a paradigm shift when electron microscopy reached atomic resolution in the late 1990s due to the invention of aberration-corrected electron optics. It is now generally accepted practice to perform picometer-scale measurements and chemical analyses with reference to single atomic units. This review has three objectives. Microscopy in atomic dimensions is applied quantum physics. The consequences of this for practical work and for the understanding and application of the results shall be worked out. Typical applications in materials science will be used to show what can be done with this kind of microscopy and where its limitations lie. In the absence of relevant monographs, the aim is to provide an introduction to this new type of electron microscopy and to enable the reader to access the literature in which special issues are addressed. The paper begins with a brief presentation of the principles of optical aberration correction. It then discusses the fundamentals of atomic imaging and covers typical examples of practical applications to problems in modern materials science. It is emphasized that in atomic-resolution electron microscopy the quantitative interpretation of the images must always be based on the solution of the quantum physical and optical problem on a computer.
Scanning Transmission Electron Microscopy of Nanostructures

S.J. Pennycook,M. Varela,M.F. Chisholm,A.Y. Borisevich,A.R. Lupini,K. van Benthem,M.P. Oxley,W. Luo,J.R. McBride,S.J. Rosenthal,S.H. Oh,D.L. Sales,S.I. Molina,K. Sohlberg,S.T. Pantelides

DOI: https://doi.org/10.1093/oxfordhb/9780199533053.013.6

2017-01-01

Abstract:This article investigates nanostructures by means of scanning transmission electron microscopy. The electron microscope is uniquely suited to the study of individual nanostructures, allowing differentiation of different structures and properties that is difficult or impossible to do with techniques that provide a spatial average. The present generation of aberration correctors, which correct all aberrations up to third order, makes it possible to obtain sufficient sensitivity to image and spectroscopically analyze single atoms. This article begins with a brief overview of the correction of lens aberration in electron microscopy, followed by several examples of insights into nanomaterials and the atomic origins of their functionality. In particular, it considers semiconductor nanocrystals, semiconductor quantum wires, and nanocatalysts. It also discusses magnetism in gold and silver nanoclusters as well as charge ordering in manganites.
Multidimensional Images and Aberrations in STEM

Eric R. Hoglund,Andrew R. Lupini

DOI: https://doi.org/10.1088/1674-1056/ad73b2

2024-08-30

Chinese Physics B

Abstract:Recent advances in scanning transmission electron microscopy (STEM) have led to increased development of multi-dimensional STEM imaging modalities and novel image reconstruction methods. This interest arises because the main electron lens in a modern transmission electron microscope usually has a diffraction-space information limit that is significantly better than the real-space resolution of the same lens. This state-of-affairs is sometimes shared by other scattering methods in modern physics and contributes to a broader excitement surrounding multidimensional techniques that scan a probe while recording diffraction-space images, such as ptychography and scanning nano-beam diffraction. However, the contrasting resolution in the two spaces raises the question as to what is limiting their effective performance. Here, we examine this paradox by considering the effects of aberrations in both image and diffraction planes, and likewise separate the contributions of pre- and post-sample aberrations. This consideration provides insight into aberration-measurement techniques and might also indicate improvements for super-resolution techniques.

physics, multidisciplinary
Optical Sectioning and Confocal Imaging and Analysis in the Transmission Electron Microscope

Peter D. Nellist,Peng Wang

DOI: https://doi.org/10.1146/annurev-matsci-070511-155016

2012-01-01

Abstract:Aberration correction in the transmission electron microscope has led to a reduction in the depth of focus for imaging. The depth of focus in a state-of-the-art scanning transmission electron microscope system, which is currently just a few nanometers, creates an opportunity to explore the three-dimensional structure of a sample by focusing on specific layers, an approach known as optical sectioning. In this article, we review the performance of optical sectioning in the scanning transmission electron microscope. Limitations in the simple optical sectioning approach are used to motivate discussion of confocal electron microscopy. Three imaging modes in scanning confocal electron microscopy have been investigated both theoretically and experimentally, and are reviewed here. The method of implementing a confocal arrangement in a microscope is discussed, along with its comparative performance with other methods for three-dimensional imaging and analysis. Finally, current and future potential applications are discussed.
High-resolution Transmission Electron Microscopy and Spectroscopy of Epitaxial Metal Oxides

Hongchu Du,Chun-Lin Jia

DOI: https://doi.org/10.1016/b978-0-08-102945-9.00014-9

2022-01-01

Abstract:Quantitative determination of local atomic and electronic structures at surfaces, interfaces, and defects and elucidation of their dynamics and influences on materials, nanostructures, and devices, thereby to develop structure–property relationships at the atomic level remains the ultimate goal of microscopy in materials sciences. The reigning paradigms are imaging and spectroscopy techniques based on aberration-corrected transmission electron microscopy (TEM). Aberration-corrected TEM provides scientists great opportunities to routinely resolve structural details, to map both compositional and bonding information, and to explore properties of thin films at the atomic scale. In chapter 13, we introduce first imaging and spectroscopic techniques based on both the conventional coherent and the scanning imaging modes of current state-of-the-art aberration-corrected transmission electron microscopes. We show then examples for application of these techniques in characterization of structural, compositional, and bonding details of interfaces and defects in thin films of metal oxides at the atomic scale.
Three-dimensional crystal defect imaging by STEM depth sectioning

Ryo Ishikawa,Naoya Shibata,Yuichi Ikuhara

DOI: https://doi.org/10.1088/1674-1056/ad4ff9

2024-05-25

Chinese Physics B

Abstract:One of the major innovations awaiting in electron microscopy is full three-dimensional imaging at atomic resolution. Despite the success of aberration correction to deep sub-ångström lateral resolution, spatial resolution in depth is still far from atomic resolution. In scanning transmission electron microscopy (STEM), this poor depth resolution is due to the limitation of the illumination angle. To overcome this physical limitation, it is essential to implement a next-generation aberration corrector in STEM that can significantly improve the depth resolution. This review discusses the capability of depth sectioning for three-dimensional imaging combined with large-angle illumination STEM. Furthermore, the statistical analysis approach remarkably improves the depth resolution, making it possible to achieve three-dimensional atomic resolution imaging at oxide surfaces. We will also discuss the future prospects of three-dimensional imaging at atomic resolution by STEM depth sectioning.

physics, multidisciplinary
Study of Point Spread in the Aberration-Corrected Transmission Electron Microscopy

Binghui Ge,Yumei Wang,Yifan Chang,Yuan Yao

DOI: https://doi.org/10.1017/s1431927614012823

IF: 4.0991

2014-01-01

Microscopy and Microanalysis

Abstract:Abstract High precision determination of atomic position is necessary for quantitative electron microscopy so that small width of peaks, which represent atoms in structural images, adequate resolution, and sufficiently strong image contrast are needed. The width of peak is usually determined by the point spread (PS) of instruments, but the PS of objects should also be taken into consideration in aberration-corrected transmission electron microscopy when point resolution of a microscope reaches the sub-angstrom scale, and thus the PS of the instrument is comparable with that of the object. In this article, PS is investigated by studying peak width with variation of atomic number, sample thickness, and spherical aberration coefficients in both negative Cs (NCSI) and positive Cs imaging (PCSI) modes by means of dynamical image simulation. Through comparing the peak width with various atomic number, thickness, and values of spherical aberration, NCSI mode is found to be superior to PCSI considering the smaller width.
High-Resolution Scanning X-ray Diffraction Microscopy

Pierre Thibault,Martin Dierolf,Andreas Menzel,Oliver Bunk,Christian David,Franz Pfeiffer

DOI: https://doi.org/10.1126/science.1158573

IF: 56.9

2008-07-18

Science

Abstract:Coherent diffractive imaging (CDI) and scanning transmission x-ray microscopy (STXM) are two popular microscopy techniques that have evolved quite independently. CDI promises to reach resolutions below 10 nanometers, but the reconstruction procedures put stringent requirements on data quality and sample preparation. In contrast, STXM features straightforward data analysis, but its resolution is limited by the spot size on the specimen. We demonstrate a ptychographic imaging method that bridges the gap between CDI and STXM by measuring complete diffraction patterns at each point of a STXM scan. The high penetration power of x-rays in combination with the high spatial resolution will allow investigation of a wide range of complex mesoscopic life and material science specimens, such as embedded semiconductor devices or cellular networks.

multidisciplinary sciences
Atomic studies on ferroelectric oxides by aberration corrected transmission electron microscopy

K. Urban,C. L. Jia

DOI: https://doi.org/10.1007/978-3-540-85226-1_2

2008-01-01

Abstract:The advent of aberration-corrected transmission electron microscopy in 1998 [1] has provided materials science with entirely new tools for quantitative investigations. Four key innovations have to be mentioned: (1) The possibility to operate the electron microscope as a variable-sphericalaberration instrument allows to derive a new phase contrast theory optimizing both resolution and point spread [2]. In classical Scherzer phase contrast theory the radius of the point spread disc amounts to three times the Scherzer resolution limit. Besides the fact that information is lost by placing an aperture in the diffraction plane to keep the contrast oscillations in the contrast transfer function from affecting the images this point spread is a second disadvantage of the classical Scherzer approach to phase contrast. Both limitations can be substantially reduced in a new theory in which by both the objective lens defocus Z as well as C S the spherical aberration parameter adopt specific values. As a result the resolution limit coincides with the information limit and the point spread gets reduced to about one half of the latter making it an uncritical parameter in practice. (2) The negative spherical aberration imaging (NCSI) technique leads to enhanced contrast of atoms with low nuclear charge number [3]. It relies on two advantages compared to the classical Zernike technique. The shift of the phase of the diffracted waves is, in contrast to the classical Scherzer technique, in clockwise direction leading to white atom contrast. Furthermore the contrast is enhanced by a dynamic non-linear effect. Oxygen, nitrogen and even boron can be imaged directly even when these atomic species occur in close distance to heavy cations. (3) Essentially point-spread-free atomic images allow to measure occupancies of atomic columns, i.e. local concentrations, with lateral atomic resolution evaluating atomically resolved intensity measurements [4]. This means that high-resolution is not only a structural technique. From now on also local composition maps can be derived which are forming an excellent starting point for ab-initio calculations of interface-, boundary- and defect structures. (4) Measurements of atomic distances can be carried out at an accuracy of a few picometers
Image Contrast in Aberration-Corrected Scanning Confocal Electron Microscopy

E.C. Cosgriff,Peter D. Nellist,Adrian J. D’Alfonso,S.D. Findlay,G. Behan,Peng Wang,L. J. Allen,Angus I. Kirkland

DOI: https://doi.org/10.1016/s1076-5670(10)62002-2

2010-01-01

Advances in Imaging and Electron Physics

Abstract:The larger objective lens numerical aperture allowed by spherical aberration correction in electron optics leads to a reduced depth of focus, which typically becomes less than the thickness of the sample. Although this may complicate image interpretation, it leads to an opportunity to measure three‐dimensional information though the technique of optical sectioning. This chapter presents a theoretical analysis of transfer functions and image contrast for aberration‐corrected scanning confocal electron microscopy (SCEM). A comparison is made to optical sectioning using conventional scanning transmission electron microscopy (STEM). It is shown that for bright‐field SCEM there is little contrast, and a missing cone in the transfer function that is also seen for STEM. Energy‐filtered SCEM is seen to have strong transfer and no missing cone in the transfer function.
The Limits of Resolution and Dose for Aberration-Corrected Electron Tomography

Reed Yalisove,Suk Hyun Sung,Peter Ercius,Robert Hovden

DOI: https://doi.org/10.1103/PhysRevApplied.15.014003

2020-06-12

Abstract:Aberration-corrected electron microscopy can resolve the smallest atomic bond-lengths in nature. However, the high-convergence angles that enable spectacular resolution in 2D have unknown 3D resolution limits for all but the smallest objects ($< \sim$8nm). We show aberration-corrected electron tomography offers new limits for 3D imaging by measuring several focal planes at each specimen tilt. We present a theoretical foundation for aberration-corrected electron tomography by establishing analytic descriptions for resolution, sampling, object size, and dose---with direct analogy to the Crowther-Klug criterion. Remarkably, aberration-corrected scanning transmission electron tomography can measure complete 3D specimen structure of unbounded object sizes up to a specified cutoff resolution. This breaks the established Crowther limit when tilt increments are twice the convergence angle or smaller. Unprecedented 3D resolution is achievable across large objects. Atomic 3D imaging (1$\unicode{xC5}$) is allowed across extended objects larger than depth-of-focus (e.g. $>$ 20nm) using available microscopes and modest specimen tilting ($<$ 3$^\circ$). Furthermore, aberration-corrected tomography follows the rule of dose-fractionation where a specified total dose can be divided among tilts and defoci.

Materials Science,Optics

Ultrahigh‐Resolution Transmission Electron Microscopy at Negative Spherical Aberration

Negative Spherical Aberration Ultrahigh-Resolution Imaging in Corrected Transmission Electron Microscopy

High-resolution transmission electron microscopy using negative spherical aberration.

Aberrations in Structured Illumination Microscopy: A Theoretical Analysis

On the Benefit of the Negative-Spherical-Aberration Imaging Technique for Quantitative Hrtem

Progress in Aberration-Corrected High-Resolution Transmission Electron Microscopy of Crystalline Solids

Aberration-Corrected High-Resolution Transmission Electron Microscopy and Its Applications in Functional Oxides

High-Resolution Imaging with an Aberration-Corrected Transmission Electron Micrscope

Three-dimensional imaging by optical sectioning in the aberration-corrected scanning transmission electron microscope

Progress in Atomic-Resolution Aberration Corrected Conventional Transmission Electron Microscopy (CTEM)

Scanning Transmission Electron Microscopy of Nanostructures

Multidimensional Images and Aberrations in STEM

Optical Sectioning and Confocal Imaging and Analysis in the Transmission Electron Microscope

High-resolution Transmission Electron Microscopy and Spectroscopy of Epitaxial Metal Oxides

Three-dimensional crystal defect imaging by STEM depth sectioning

Study of Point Spread in the Aberration-Corrected Transmission Electron Microscopy

High-Resolution Scanning X-ray Diffraction Microscopy

Atomic studies on ferroelectric oxides by aberration corrected transmission electron microscopy

Image Contrast in Aberration-Corrected Scanning Confocal Electron Microscopy

The Limits of Resolution and Dose for Aberration-Corrected Electron Tomography