Adsorptive separation of NF3 using ion-modified CON material

WU Yue,LI Xiaoyu,TAO Chunhui,ZHANG Ying,LI Yinhui,ZHANG Wenxiang,Yang Bolun,MA Heping
DOI: https://doi.org/10.16085/j.issn.1000-6613.2022-2371
2023-01-01
Abstract:Adsorptive separation of NF3 from semiconductor exhaust gases has become an increasingly important topic in industrial applications.By introducing iodine ions into cage-like organic network(CON),quaternized I-CON material was prepared.The DFT calculation revealed that the electric field was formed on the pore surface by introducing iodide ions,which enhanced the inducing force between NF3 molecule and I-CON framework.Compared with CON,the NF3 adsorption capacity of I-CON increased from 30.49mL/g to 45.13mL/g and the IAST selectivity increased from 10.59-15.49 to 15.01-19.47 according to the single-component gas adsorption results.Moreover,the dynamic adsorption selectivity of I-CON was also higher than that of CON in the breakthrough tests.Thus,separation ability of CON could be effectively improved by ion modification,showing its potential for the real-world NF3 capture and enrichment.
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