Abstract:Laser-sustained plasmas (LSP), which can be utilized for a novel radiation light source, have advantages such as high irradiance, broad spectral range, and stable emission, demonstrating significant applications for wafer inspection in the field of the semiconductor industry. This paper revisited the historical development of LSP research and introduced fundamental physical processes in LSP. The mathematical description equations for LSP and methods for calculating plasma parameters are given, based on which a time-dependent two-dimensional fluid model is established with laser-thermal-hydrodynamic coupling effects. The propagation of the laser in plasmas is investigated based on the established model, and the fundamental mechanisms in LSP, including the initial evolution process, laser energy deposition, steady-state characteristics, and instability, are explored. The effectiveness of the simulation model is confirmed through comparisons with the results from high-pressure Xe LSP experiments. The findings indicate that the mode, power, F number of incident lasers, as well as parameters including components, pressure, and flow velocity of gas, influence the steady-state properties of LSPs. Under identical power and F number conditions, Gaussian mode and annular mode lasers produce LSP with different shapes and positions. Notably, under conditions of high-power annular laser incidence, large laser F numbers, and high flow velocities, the simulation results reveal temporal and spatial instability in LSP. These simulation results contribute significantly to a deeper understanding of the underlying physical mechanisms of LSP. Furthermore, they provide a theoretical basis for the design of light source systems and the optimization of multiple parameters. The impact of laser parameters on LSP properties elucidated in this study advances not only the fundamental understanding of LSP but also offers crucial insights for the design and optimization of light source systems in various applications, particularly in the field of optical detection for semiconductor wafer inspection.

Optical Emission Spectroscopy of Fiber Laser Sustained Xe Plasma

Multiphysics Modeling and Simulations of Laser-sustained Plasmas

High Performance Streaked X-ray Spectrometer for Research of Laser-Produced Plasmas

Generation of High-Temperature and Low-Density Plasmas for Improved Spectral Resolutions in Laser-Induced Breakdown Spectroscopy

OPTICALEMISSIONMEASUREMENTS OFLASER INITIATED, RFSUSTAINEDHIGHPRESSURE SEEDEDPLASMAS*

Improvement of Spectral Intensity and Resolution with Fiber Laser for On-Stream Slurry Analysis in Laser-Induced Breakdown Spectroscopy

Nonequilibrium warm dense matter investigated with laser–plasma-based XANES down to the femtosecond

Spectroscopic study on the laser-induced breakdown flame plasma

Multichannel Doppler fiber-imager spectrometer for spatiotemporal characterization of high-intensity laser-driven plasmas

Spatial Confinement of Laser-Induced Plasma by Laser-Induced and Obstacle-Reflected Shock Wave and Its Effect on Optical Emission of Laser-Induced Plasma

Optical Emission Spectral Analysis of Pulse Modulated Plasma

Synergy enhancement and signal uncertainty of magnetic-spatial confinement in fiber-optic laser-induced breakdown spectroscopy

Experimental Study on the Temporal Evolution Parameters of Laser–Produced Tin Plasma under Different Laser Pulse Energies for LPP–EUV Source

Spectroscopic Study on the Time Evolution Behaviors of the Laser-Induced Breakdown Air Plasma

Spectral characteristics of laser plasma instabilities with broadband laser

A Comparative Analysis of the Passive Electric Probe Detection and Spectrum Diagnosis of Laser-Induced Plasma

Spatiotemporal dynamics of fast electron heating in solid-density matter via XFEL

Combined enhancement of fiber-optic laser-induced breakdown spectroscopy coupling spatial confinement and double-pulse irradiation

Bright X-ray source from a laser-driven micro-plasma-waveguide

Observation of ultrafast solid-density plasma dynamics using femtosecond X-ray pulses from a free-electron laser

Experimental study of ignition and combustion characteristics assisted by laser-induced plasma during oxy-coal atmosphere by optical emission spectroscopy