Challenges and Opportunities of Chemiresistors Based on Microelectromechanical Systems for Chemical Olfaction.

Mengya Guo,James T. Brewster,Huacheng Zhang,Yuxin Zhao,Yanli Zhao
DOI: https://doi.org/10.1021/acsnano.2c08650
IF: 17.1
2022-01-01
ACS Nano
Abstract:Microelectromechanical-system (MEMS)-based semiconductor gas sensors are considered one of the fastest-growing, interdisciplinary high technologies during the post-Moore era. Modern advancements within this arena include wearable electronics, Internet of Things, and artificial brain-inspired intelligence, among other modalities, thus bringing opportunities to drive MEMS-based gas sensors with higher performance, lower costs, and wider applicability. However, the high demand for miniature and micropower sensors with unified processes on a single chip imposes great challenges. This review focuses on recent developments and pitfalls in MEMS-based micro- and nanoscale gas sensors and details future trends. We also cover the background of the topic, seminal efforts, current applications and challenges, and opportunities for next-generation systems.
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