Abstract:The evolution of surface morphologies of films prepared by ion-based deposition techniques has been investigated by atomic force microscopy. Two deposition processes, filtered arc deposition (FAD) and ion-beam-assisted deposition, where low-energy (<100 eV) ion irradiation and high-energy (several tens of keV) ion-beam bombardment concurrent with film growth were involved, respectively, have been employed to prepare TiN and Al films. Comparative studies on the effect of energetic ions on the development of topography have been performed between the low-ion-energy regime and high-ion-energy regime. In addition, the relationship between topography and mechanical properties of thin films has been revealed, by involving thin films prepared by thermal evaporation deposition (TED), where almost all depositing particles are neutral. In the images of the TED TiN and Al films, a large number of porous and deep boundaries between columnar grains was observed, suggesting a very rough and loose surface. In contrast, the FAD films exhibited much denser surface morphologies, although still columnar. The root-mean-square roughness of the FAD films was less than 1 Å. Hardness test and optical parameter measurement indicated that the FAD films were much harder and, in the case of optical films, much more transparent than the TED films, which was considered to arise from the denser surface morphologies rather than crystallization of the films. The high density and super smoothness of the FAD films, and the resultant mechanical and optical properties superior to those of the TED films, were attributed to the enhancement of surface migration of the deposited adatoms in the FAD process, which could provide intensive low-energy ion irradiation during film growth. As for topography modification by high-energy ion-beam bombardment concurrent with film growth, in addition to the increase of surface diffusion due to elastic collision and thermal spikes, physical sputtering must be considered while explaining the development of the film topography. Both surface migration enhancement and sputtering played important roles in the case of high-energy heavy-ion-beam bombardment, under which condition surface morphology characterized by dense columns with larger dimension and deep clean boundaries was formed. However, under high-energy light-ion-beam bombardment, the sputtering was dominant, and the variation of sputtering coefficient with position on the surface of growing film led to the formation of cones.

Modifying of surface properties and structural characteristics of low energy argon beam irradiated methylcellulose/TiO2 nanocomposite films

Polymer/MMT nano-composite coatings formed by colloidal packing and their properties

Impacts of Low Energy Oxygen Irradiation on the Dielectric Properties of PVA/TiO2 Nanocomposite Films

Influence of ion beam on the surface characteristics and structural properties of PVA/TiO 2 films

Surface Morphology and Modulus, Wetting Behavior and Photocatalytic Activity of the TiO2 Coated Materials Based on PMMA/O-MMT Composite Microfibers

Influence of Ni13+ Ions Irradiation on the Microstructure, Mechanical and Tribological Properties of Mo-S-Ti Composite Films

Impacts of Low Energy Argon Beam on Enhancing the Surface Wettability and Electrical Performance of CA/PANI Films

Atomic Force Microscopy Study on Topography of Films Produced by Ion-Based Techniques

Au+ irradiation regulated surface defects and dielectric properties of CaCu3Ti4O12/CoFe2O4/epoxy composites

Surface Modifications by Both Anodic Oxidation and Ion Beam Implantation on Electropolished Titanium Substrates

Surface modification of LTI carbon by titanium oxide coating synthesised by ion beam

Influence of argon irradiations on modifying the surface properties and optical behavior of polymer composite films

PDMS/TiO2 and PDMS/SiO2 Nanocomposites: Mechanical Properties' Evaluation for Improved Insulating Coatings

Study of microstructure and corrosion behavior of nano-Al2O3 coating layers on TiO2 substrate via polymeric method and microwave combustion

Engineering and modification of physical properties of thermoplastic polymeric films using oxygen ions bombardment for industrial applications

Preparation, structural characterizations and surface studies of irradiated flexible PPy/Fe2O3/PET polymer nanocomposite films for dielectric applications

Influence of Ion Irradiation on the Surface Properties of Silver-Coated Flexible PDMS Polymeric Films

Study of the influence of electron beam irradiation on the microstructural and mechanical characteristics of titanium-coated Al-Si alloy

Titanium carbide-based (Ti 3 C 2 ) MXene@Zn-doped-S-polyaniline nanosheets: Toward thermo-mechanical and UV-shielding properties enhancement

Growth of Nanostructured TiO2 Thin Films onto Lignocellulosic Fibers through Reactive DC Magnetron Sputtering: A XRD and SEM Study

Effects of TiO2 Nanoparticles on the Overall Performance and Corrosion Protection Ability of Neat Epoxy and PDMS Modified Epoxy Coating Systems