Monolithic Three-Dimensional Integration of RRAM-based Hybrid Memory Architecture for One-Shot Learning

Yijun Li,Jianshi Tang,Bin Gao,Jian Yao,Anjunyi Fan,Bonan Yan,Yuchao Yang,Yue Xi,Yuankun Li,Jiaming Li,Wen Sun,Yiwei Du,Zhengwu Liu,Qingtian Zhang,Song Qiu,Qingwen Li,He Qian,Huaqiang Wu
DOI: https://doi.org/10.1038/s41467-023-42981-1
IF: 16.6
2023-01-01
Nature Communications
Abstract:In this work, we report the monolithic three-dimensional integration (M3D) of hybrid memory architecture based on resistive random-access memory (RRAM), named M3D-LIME. The chip featured three key functional layers: the first was Si complementary metal-oxide-semiconductor (CMOS) for control logic; the second was computing-in-memory (CIM) layer with HfAlO x -based analog RRAM array to implement neural networks for feature extractions; the third was on-chip buffer and ternary content-addressable memory (TCAM) array for template storing and matching, based on Ta 2 O 5 -based binary RRAM and carbon nanotube field-effect transistor (CNTFET). Extensive structural analysis along with array-level electrical measurements and functional demonstrations on the CIM and TCAM arrays was performed. The M3D-LIME chip was further used to implement one-shot learning, where ~96% accuracy was achieved on the Omniglot dataset while exhibiting 18.3× higher energy efficiency than graphics processing unit (GPU). This work demonstrates the tremendous potential of M3D-LIME with RRAM-based hybrid memory architecture for future data-centric applications.
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