A Study of MEMS 3-axis Force Sensor Integrated with Self-calibration Function

Mengyi Hu,Yunhong Xing,Ting Yu,Yuxin Zhong,Jiabo Zhao,Weilong You,Guoqiang Wu,Chaoran Liu,Linxi Dong
DOI: https://doi.org/10.1109/MARSS58567.2023.10294111
2023-01-01
Abstract:To improve the accuracy of the measurement results of traditional sensors and save additional calibration costs, this paper reports the design and calibration of a MEMS 3-axis force sensor with a piezoelectric drive to generate the force signal source. The finite element simulation verifies the working principle and calibration function of the sensor which has a linear range of <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$&gt; 2\mathrm{N}$</tex> in the 3-axis, as well as the detection sensitivity of the sensor is 477.74 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{fF}/\mathrm{N}$</tex> in the normal(z) direction and 723.66 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{fF}/\mathrm{N}$</tex> in the tangential(x/y) direction. Under 10V voltage driving, the normal and tangential calibration ranges reach 174 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{mN}$</tex> and 355 <tex xmlns:mml="http://www.w3.org/1998/Math/MathML" xmlns:xlink="http://www.w3.org/1999/xlink">$\text{mN}$</tex> respectively. The sensor designed in this paper can be used as an essential medium for intelligent robots to sense human life and has good potential for applications in medical care, the robotics industry, and wearable devices.
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