Cellulose Derivative for Biodegradable and Large-Scalable 2D Nano Additive Manufacturing

Chun Cao,Lingling Guan,Xiaoming Shen,Xianmeng Xia,Yiwei Qiu,Hongqing Wang,Zhenyao Yang,Dazhao Zhu,Chenliang Ding,Cuifang Kuang,Xu Liu
DOI: https://doi.org/10.1016/j.addma.2023.103740
IF: 11
2023-01-01
Additive Manufacturing
Abstract:Two-photon lithography (TPL) has been continuously improved and employed in versatile additive manufacturing for decades. Unfortunately, large-scale 2D nano additive manufacturing via TPL remains challenging due to the lack of suitable solid two-photon photoresists (TPPs). Although some commercial solid UV photoresists have been reported for TPL application, their slow two-photon adsorption results in insufficient sensitivity and unsatisfactory critical dimension (CD). More importantly, commercial photoresists are compli-cated to synthesize, difficult to biodegrade, and will pose a pollution risk to environment. In this work, cellulose derivative, a natural bio-polymer, is introduced to form a biodegradable solid TPP (Cel-STPP-x) for TPL. The preeminent photo-sensitivity and two-color photo-sensitivity allow Cel-STPP-x to have a considerable writing speed (2.43 m s_ 1) and a remarkable CD (42 nm), which are superior to the majority of reported TPPs. Subse-quently, a 1-inch silica-based grating is created through TPL, etching, and stripping, indicating that Cel-STPP-x may be employed not only for large-scale nano additive manufacturing but also for pattern transfer, which is critical for producing diverse micro devices. Besides, the used Cel-STPP-x can be rapidly decomposed in soil. Overall, this work may pave the way for TPL towards sustainable and large-scale 2D nano additive manufacturing.
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