Abstract:One dimensional fluid/electron Monte Carlo simulations of capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms are performed as a function of the number of consecutive harmonics driving frequencies of 13.56 MHz, N (1-3), pressure (200-500 mTorr) and gas mixture (10-90 % admixture of O2 to Ar). The effects of these external parameters on the electron dynamics, and the transport of ions and neutrals are revealed at constant peak-to-peak driving voltage. The electronegativity is found to decline as the number of consecutive harmonics increases and the DC self-bias voltage decreases. Increasing the pressure also leads to a decrease in electronegativity. The combination of a decrease in the mean free path of electrons and the presence of the Electrical Asymmetry Effect (EAE) result in different spatio-temporal distributions of the ionization rate, which lead to a reduction in the amplitude of the DC self-bias at higher pressure. As the admixture of electronegative O2 increases, the electronegativity is enhanced, and the discharge mode changes from an {\alpha}-Drift Ambipolar (DA) hybrid to DA mode. This work focuses on linking these fundamental changes of the plasma physics induced by changing external parameters to process relevant charged particle and neutral fluxes to the electrodes. Particular attention is paid to O(1D) flux, because it is a precursor of deposition. In discharges driven by sawtooth up voltage waveforms, placing the substrate on the grounded electrode and increasing the number of consecutive harmonics, N, can facilitate the deposition process, since the O(1D) flux to the substrate is higher in these scenarios. Moreover, at an O2 admixture of 20%, the O(1D) flux is nearly as high as that at an O2 admixture of 90%, indicating that a higher O(1D) flux can be achieved without excessively increasing the O2 admixture.

Fast Simulation of the E–H Mode Transition in Ar/O2 Inductively Coupled Plasmas

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The Influence of Gas Pressure on E↔H Mode Transition in Argon Inductively Coupled Plasmas

Spatially-resolved oes measurement of inductively-coupled plasmas in E and H modes

Experimental and Numerical Investigations of the Characteristics of Electron Density in O2/Ar Pulsed Planar-Coil-driven Inductively Coupled Plasmas

The transition mechanisms of the E to H mode and the H to E mode in an inductively coupled argon-mercury mixture discharge

Spatially resolved optical emission spectroscopy investigation of E and H modes in cylindrical inductively coupled plasmas

Hysteresis and Mode Transitions in Inductively Coupled Ar–Hg Plasma in the Electrodeless Induction Lamp

E→H Mode Transition Density and Power in Two Types of Inductively Coupled Plasma Configuration

Mode Transition of Inductively Coupled Plasma in Interlayer Chamber

Electron dynamics and particle transport in capacitively coupled Ar/O2 discharges driven by sawtooth up voltage waveforms

Numerical Modeling of the Transition from Low to High Confinement in Magnetically Confined Plasma

Transient striations in an inductively coupled plasma during E-to-H transitions

Space and phase resolved optical emission in mode transitions of radio-frequency inductively coupled plasmas

Spatially Resolved Ground State Atomic Oxygen Density During the Mode Transition of Inductively Coupled Oxygen Plasmas

A hybrid method to simulate an inductively coupled Ar-Hg plasma

Dependence of mode transition points and hysteresis upon plasma pressure in a re-entrant configuration of inductively coupled plasma

On the wave mode transition of argon helicon plasma

Frequency-dependent electron power absorption mode transitions in capacitively coupled argon-oxygen plasmas

Simulation of Low-Pressure Inductively Coupled Plasma with Displacement Potential and Gas Flow

Experimental and Simulation Investigation of Electrical and Plasma Parameters in a Low Pressure Inductively Coupled Argon Plasma