Abstract:Fabrication of functional devices that require a high-temperature annealing process on a thin, temperature-sensitive substrate is a long-standing, crucial issue in flexible electronics. Herein, we propose a transfer-free laser lift-off method to directly fabricate lead zirconate titanate (PZT) piezoelectric sensors that commonly undergo a high-temperature annealing (∼650 °C) on ubiquitous flexible substrates, including polyimide (∼300 °C), polyethylene terephthalate (∼120 °C), and polydimethylsiloxane (∼150 °C). The method includes the steps of fabricating sensors, encapsulating a flexible substrate, and peeling off the device by melting the sacrificial PZT layer at the interface with a sapphire glass. The appropriate fluence of laser energy has been figured out to avoid inadequate stripping or damage of the device. In addition, a process window for reliable stripping of the device has been established among the laser fluence and the thickness of the sacrificial layer and the supporting substrate. Furthermore, the capability of the newly proposed technique has been verified and expanded by successfully integrating several sensors that need skillful low-temperature heating treatment on top of a flexible supporting substrate accordingly before stripping. Finally, a PZT-integrated, bilateral multimodal sensor on a PI substrate has been fabricated, and the device demonstrates excellent performance and stability toward perceiving distributed dynamic pressure and temperature stimuli, revealing its high potential for the fabrication of high-performance devices for multimodal sensing applications.This article has not yet been cited by other publications.

A Flexible Multimodal Sensor for Fully Decoupled Crosstalk-Free Pressure and Temperature Sensing Via Laser Direct Writing.

Single Optical Microfiber Enabled Tactile Sensor for Simultaneous Temperature and Pressure Measurement

Crosstalk-free Hybrid Integrated Multimodal Sensor for Human Temperature, Humidity, and Pressure Monitoring

A Dual-Mode Pressure and Temperature Sensor

Fully inkjet-printed dual-mode sensor for simultaneous pressure and temperature sensing with high decoupling

Femtosecond laser micro-fabricated flexible sensor arrays for simultaneous mechanical and thermal stimuli detection

Ultra-sensitive flexible pressure sensor with hierarchical structural laser-induced carbon nanosheets/carbon nanotubes composite film

Integrating In‐Plane Thermoelectricity and Out‐Plane Piezoresistivity for Fully Decoupled Temperature‐Pressure Sensing

Multifunctional Flexible Sensor Based on Laser-Induced Graphene

Ti 3 C 2 T x MXene-based all-resistive dual-mode sensor with near-zero temperature coefficient of resistance for crosstalk-free pressure and temperature detections

Integrated temperature and pressure dual-mode sensors based on elastic PDMS foams decorated with thermoelectric PEDOT:PSS and carbon nanotubes for human energy harvesting and electronic-skin

Laser Fabrication and Performance of Flexible Pressure Sensors with Ridge-Mimicking Spatially Ordered Microstructures

A Highly Sensitive Flexible Pressure Sensor Based on Laser-Induced Graphene and a Composite Dielectric Structure

Linear Capacitive Pressure Sensor with Gradient Architecture through Laser Ablation on MWCNT/Ecoflex Film

Advancing pressure sensors performance through a flexible MXene embedded interlocking structure in a microlens array

Flexible Capacitive Pressure Sensor Based on Multi-Walled Carbon Nanotube Electrodes

Self-Powered Resilient Porous Sensors with Thermoelectric Poly(3,4-ethylenedioxythiophene):Poly(styrenesulfonate) and Carbon Nanotubes for Sensitive Temperature and Pressure Dual-Mode Sensing

Flexible PZT-Integrated, Bilateral Sensors via Transfer-Free Laser Lift-Off for Multimodal Measurements

Ultra-sensitive and precisely decoupled pressure and temperature detection with a "soft-hard" asymmetrically structured sensor based on carbon-nanocoils

High-performance Flexible Piezoresistive Pressure Sensor Based on Multi-layer Interlocking Microstructures

Intelligent Flexible Pressure Sensors with Improved Sensing Range and Sensitivity Based on 3D-Graphene Patterning Induced by UV Laser.