Gas Sensing Properties of Metal-Organics Derived Pt Dispersed-Tio2 Thin Film Fired in NH3

I. Hayakawa,Y. Iwamoto,K. Kikuta,S. Hirano
DOI: https://doi.org/10.1016/s0925-4005(00)00517-7
IF: 9.221
2000-01-01
Sensors and Actuators B Chemical
Abstract:Metal-organic precursor solution for coating was synthesized using Ti alkoxide derivative, amino acid, platinum salt and methanol as a solvent, in which TiO2 sol was also added to control the pore structure. This solution was spin coated on glass substrate and pretreated in wet air, followed by firing in 3% H2/Ar. The thin film fired at 450°C showed the highest gas sensitivity and selectivity to H2. However, the film fired at 600°C showed no sensitivity to reducing gases. In contrast, high gas sensitivity and selectivity to H2 was observed on the film fired in NH3 at 600°C, in which the solid solution of nitrogen into TiO2 was observed. The firing in NH3 is considered to suppress the degradation of sensitivity resulting from SMSI.
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