Perovskite Solar Cells with All Functional Layers Deposited by Magnetron Sputtering

Zongyang Peng,Zhuang Zuo,Qi,Shaocong Hou,Yongping Fu,Dechun Zou
DOI: https://doi.org/10.1021/acsaem.3c00971
IF: 6.4
2023-01-01
ACS Applied Energy Materials
Abstract:Exploringdeposition techniques suitable for industrial productionis an important development direction for perovskite solar cells (PSCs).Magnetron sputtering is one of the most well-developed vapor depositiontechniques in the electronics industry, with advantages such as widematerial selection, uniform and dense film formation, and a fast depositionspeed. All functional layers of PSCs can be deposited with magnetronsputtering. Replacing the organic charge transport layer (CTL) witha sputtered inorganic CTL can also reduce cost and improve stability.However, due to the working principle of momentum exchange in magnetronsputtering, the deposited particles have an extremely high kineticenergy. It will damage the soft lattice perovskite material if thedeposition process is continued upon the perovskite layer. In thiswork, devices with a structure of FTO/NiO x /perovskite/SnO2/Ag were prepared by magnetron sputtering.A mixed sputtering buffer layer of PMMA and PCBM was coated on topof the perovskite layer to prevent the damage caused by further-depositedSnO(2) while ensuring good charge transport. Finally, thepower conversion efficiency (PCE) of the PSCs based on solution-depositedperovskite reached 17.43%, and the PCE of PSCs with all functionallayers (including perovskite layers) deposited by magnetron sputteringreached 14.62%. Thanks to the dense and stable inorganic CTL, thedevice exhibited excellent long-term stability, maintaining 93.5%of its initial PCE after being placed in a nitrogen box for 2000 h.This work, for the first time, achieved magnetron sputtering depositionof all functional layers for PSCs. This new fabrication process offersa new path for the industrialization of PSCs.
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