Development of Damage and Its Impact on Surface Recombination Velocities in Dry-Etched InP-based Photonic Crystals

Audrey Berrier,Yao Shi,S. Marcinkevičius,Sailing He,S. Anand
2008-01-01
Abstract:Development of damage and its impact on surface recombination velocities in dry-etched InP-based photonic crystals
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