Nano-CNC Machining of Sub-THz Vacuum Electron Devices

Diana Gamzina,Logan G. Himes,Robert Barchfeld,Yuan Zheng,Branko K. Popovic,Claudio Paoloni,EunMi Choi,Neville C. Luhmann
DOI: https://doi.org/10.1109/ted.2016.2594027
IF: 3.1
2016-01-01
IEEE Transactions on Electron Devices
Abstract:Nano CNC machining technology is employed for the fabrication of sub-THz (100 -1,000 GHz) vacuum electron devices.Sub-micron feature tolerances and placement accuracy have been achieved; surface roughness of a few tens of nanometers has been demonstrated providing high quality rf transmission and reflection parameters on the tested circuit structures.Details on the manufacturing approach is reported for the following devices: W-band sheet beam klystron, two designs of a 220 GHz sheet beam double staggered grating travelling wave tube, 263 GHz sheet beam travelling wave tube amplifier for an electron paramagnetic resonance spectrometer, 346 GHz sheet beam backward wave oscillator for fusion plasma diagnostics, 346 GHz pencil beam backward wave oscillator, and 270 GHz pencil beam folded waveguide travelling wave tube selfdriving amplifier.Application of the Nano-CNC machining to nano-composite scandate tungsten cathodes as well as to passive rf components is also discussed.
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