Comparison of PECVD Temperature Control Methods

Yajie Huang,Donglai Zhang,Bin Zhang,Anshou Li
DOI: https://doi.org/10.1109/ic2ecs57645.2022.10088105
2022-01-01
Abstract:Various coating devices of temperature field of plasma-enhanced chemical vapor deposition (PECVD) can be employed during operation. The heating resistance, which is used to heat the temperature field inside the device, is applied in various powers from temperature increases that the temperature field further produces. Temperature management is essential because the temperature range directly affects the coating quality. This research derives the temperature increase relation of the regional center point through the finite element simulation analysis of the thermal field. The parameter identification method is used to identify the model of the controlled item. With multiple control methods compared, the simulation results show that the Dahlin control method performs better in adjustment time and stability than others, which has more practical application value in temperature control.
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