Abstract:The growth process of Czochralski (Cz) silicon single crystal is a dynamic time-varying system with nonlinearity, strong coupling, large hysteresis, and uncertain model. Traditional model-based control methods are difficult to achieve satisfactory crystal growth control effects, and it is difficult to ensure that the crystal quality meets the actual process requirements. Therefore, from the perspective of data-driven modeling and control, this paper proposes a model predictive control method for the crystal growth process with a V/G soft-sensing model for measuring crystal quality. First, because the V/G value to measure crystal quality is difficult to obtain directly, a hybrid variable weighted stacked autoencoder random forest (HVW-SAE-RF) soft-sensing model based on data-driven V/G value is established. Here, the HVW-SAE is used to extract the deep quality-related features of the measurable process data, and the RF is used for the regression prediction of the SAE output layer; Second, using the dual closed-loop control strategy, the inner loop is based on the HVW-SAE-RF soft-sensing model of the V/G value, and the predictive PI control method is used to control the V/G value closely related to the crystal quality within a reasonable range, and the outer loop based on real-time estimation of V/G values to achieve nonlinear model predictive control (NMPC) of crystal diameter; finally, the effectiveness of the proposed method is verified based on the industrial production process data of silicon single crystal.

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