Abstract:Abstract The extremely high peak intensity associated with ultrashort pulse width of femtosecond laser allows us to induce nonlinear interaction such as multiphoton absorption and tunneling ionization with materials that are transparent to the laser wavelength. More importantly, focusing the femtosecond laser beam inside the transparent materials confines the nonlinear interaction only within the focal volume, enabling three-dimensional (3D) micro- and nanofabrication. This 3D capability offers three different schemes, which involve undeformative, subtractive, and additive processing. The undeformative processing preforms internal refractive index modification to construct optical microcomponents including optical waveguides. Subtractive processing can realize the direct fabrication of 3D microfluidics, micromechanics, microelectronics, and photonic microcomponents in glass. Additive processing represented by two-photon polymerization enables the fabrication of 3D polymer micro- and nanostructures for photonic and microfluidic devices. These different schemes can be integrated to realize more functional microdevices including lab-on-a-chip devices, which are miniaturized laboratories that can perform reaction, detection, analysis, separation, and synthesis of biochemical materials with high efficiency, high speed, high sensitivity, low reagent consumption, and low waste production. This review paper describes the principles and applications of femtosecond laser 3D micro- and nanofabrication for lab-on-a-chip applications. A hybrid technique that promises to enhance functionality of lab-on-a-chip devices is also introduced.

Ultracompact wavefront characterization of femtosecond 3D printed microlenses using double-frequency Ronchi interferometry

Femtosecond laser 3D printed micro objective lens for ultrathin fiber endoscope

Fiber-integrated Hybrid Achromatic Microlenses by Combined Femtosecond Laser 3D Printing

Ultra-long-working-distance spectroscopy of single nanostructures with aspherical solid immersion microlenses

Single-pulse Writing of a Concave Microlens Array.

Fabrication of a Micro-Optical Lens Using Femtosecond Laser 3D Micromachining for Two-Photon Imaging of Bio-Tissues

Development of a 3D ultrafast laser written near-infrared spectro-interferometer

3D‐Printed Micro Lens‐in‐Lens for In Vivo Multimodal Microendoscopy

3D‐Printed Micro Lens‐in‐Lens for In Vivo Multimodal Microendoscopy (Small 17/2022)

Fast Micron-Scale 3D Printing with a Resonant-Scanning Two-Photon Microscope

High-Resolution Femtosecond Laser 3d Micromachining Using Low-Na Focusing Systems

Optofluidic Microlenses: All‐Glass 3D Optofluidic Microchip with Built‐in Tunable Microlens Fabricated by Femtosecond Laser‐Assisted Etching (advanced Optical Materials 9/2018)

Rapid Fabrication Of Continuous Surface Fresnel Microlens Array By Femtosecond Laser Focal Field Engineering

Ultrafast three-dimensional printing of optically smooth microlens arrays by oscillation assisted digital light processing.

3D-Printed Optics for Wafer-Scale Probing

Three-dimensional femtosecond laser processing for lab-on-a-chip applications

Optically Clear and Resilient Free-Form µ-Optics 3D-Printed via Ultrafast Laser Lithography

3D Printing: High‐Speed 3D Printing of Millimeter‐Size Customized Aspheric Imaging Lenses with Sub 7 Nm Surface Roughness (adv. Mater. 18/2018)

Femtosecond Laser 3d Micromachining: A Powerful Tool for the Fabrication of Microfluidic, Optofluidic, and Electrofluidic Devices Based on Glass

Fabrication of micro-structures for optically driven micromachines using two-photon photopolymerization of UV curing resins

Ultrahigh precision laser nanoprinting based on defect-compensated digital holography for fast-fabricating optical metalenses