Controlled Crystal Growth of ZnO Nanobelts by Chemical Vapor Deposition Method

Rintaro SUGANUMA,Yasuhiro KIMURA,Yuhki TOKU,Yang JU
DOI: https://doi.org/10.1299/jsmemm.2022.os0820
2022-01-01
The Proceedings of the Materials and Mechanics Conference
Abstract:With the development expansion of environmental sensors in recent years, nanogenerators utilizing small amounts of mechanical energy in surrounding environment to generate electricity have been frequently studied. In order to convert mechanical energy into electrical energy more efficiently, it is necessary to fabricate single crystal ZnO nanostructures with specific crystal facet that exhibits piezoelectricity in the direction of applied strain. Since ZnO nanobelts have three pairs of crystal facets, controlling crystal growth can increase the size of specific crystal facet and their piezoelectricity is greater than that of ZnO nanowires, which is advantageous for power generation using piezoelectricity. ZnO nanobelts have been fabricated by chemical vapor deposition method, and we attempted to control the crystal growth by changing the heating temperature and pressure. Morphologies were observed by field emission scanning electron microscopy. Diffraction patterns were observed by transmission electron microscopy. ZnO nanobelts with the growth direction of [0001] and [0110] have been successfully fabricated in this research.
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