Multi-closed-loop Noise Model of MEMS Gyroscope

Weihao Nie,Bo Jiang,Qi Fan,Yan Su
DOI: https://doi.org/10.1109/ICPECA56706.2023.10076168
2023-01-01
Abstract:MEMS gyroscope with closed-loop detection in mode-matched case has good overall performance, and it is one of the micro-gyroscope schemes with development potential at present. However, the existence of multiple closed loops makes noise sources of measurement and control system more. By constructing noise model, the contribution of each noise source to zero rate output can be quantified, and the influence of structure and circuit parameters on noise performance parameter can be found out. In this paper, the generation mechanism of mechanical thermal noise, pre-amplifier noise, feed-through noise and other noises in gyroscope resonant system is studied, and three noise coupling paths from driving loop to detection loop are constructed, thus the gyro system-level noise model is constructed.
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